System-Level Synthesis

  • Tamal Mukherjee
  • Gary K. Fedder
Chapter
Part of the Microsystems book series (MICT, volume 13)

Synopsis

Microelectromechanical Systems such as resonators, accelerometers, gyroscopes, IR sensors, RF filters, electrothermal converters and force sensors can be composed out of beam springs, plate masses, dampers, and electromechanical comb sensors and actuators. MEMS design involves iteratively designing each of these submodules and the entire transducer including the electronics, to meet given design specifications. System-level synthesis helps automate much of this design problem for a fixed MEMS transducer topology. First, geometric layout design variables are identified to describe the topology. Next, functional constraints that map these variables to engineering performance specifications are obtained by static and dynamic mechanical as well as electrostatic analysis. Then, the variables and constraints are used to formulate a mixed-integer non-linear optimization problem, which is solved to synthesize the transducer layout from high-level engineering specifications. A variety of objective functions can be used to automate the exploration of the entire design space given specific user-specified engineering constraints, allowing the designer to understand the complex design trade-offs inherent to the design problem.

Keywords

Design Variable Functional Constraint Defence Advance Research Project Agency Style Variable Synthesis Methodology 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
This is a preview of subscription content, log in to check access.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    S. D. Senturia, “Microfabricated structures for the measurement of mechanical properties and adhesion of thin films,” Proc. 4th Int’l. Conf. Solid-State Sensors and Actuators (Transducers ‘87), pp. 11–16.Google Scholar
  2. 2.
    H. A. C. Tilmans, “Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems,” J. Micromech. Microeng., vol. 6, no. 1, pp. 157–176, 1996.CrossRefGoogle Scholar
  3. 3.
    T. Mukherjee, G. K. Fedder, D. Ramaswamy and J. White, “Emerging Simulation Approaches for Micromachined Devices,” IEEE Transactions on CAD, “Special Issue: EDA at the Turn of the Century”, vol. 19, no. 12, Dec. 2000, pp. 1572–1588.Google Scholar
  4. 4.
    S. T. Picraux and P. J. McWhorter, “The broad sweep of integrated microsystems,” IEEE Spectrum, vol 35, no. 12, pp. 24–33, Dec. 1998.CrossRefGoogle Scholar
  5. 5.
    D. Ramaswamy, N. Aluru, and J. White, “Fast Coupled-Domain, Mixed-Regime Electromechanical Simulation,” Proc. 10th Int’l. Conf. on Solid-State Sensors and Actuators (Transducers ‘99), pp. 314–317.Google Scholar
  6. 6.
    M. Bachtold, J. G. Korvink and H. Baltes, “The Adaptive, Multipole-Accelerated BEM for the Computation of Electrostatic Forces,” Proc. CAD for MEMS, Zurich, 1997, pp. 14.Google Scholar
  7. 7.
    D. L. DeVoe and A. P. Pisano, “Modeling and optimal design of piezoelectric cantilever microactuators,” J. Microelectromech. Syst., vol. 6, no. 3, pp. 266–270, 1997.CrossRefGoogle Scholar
  8. 8.
    L. Yin and G. K. Ananthasuresh, “A novel topology design scheme for the multiphysics problems of electro-thermally actuated compliant micromechanisms,” Sens. and Act. A, 97–98, pp. 599–609.Google Scholar
  9. 9.
    D. Haronain, “Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry,” Sens. and Act. A, 50 (1995), pp. 223–6.CrossRefGoogle Scholar
  10. 10.
    W. Ye, S. Mukherjee, and N.C. MacDonald, “Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems”, J. Microelectromech. Syst., March 1998, vol. 7, pp. 16–26.CrossRefGoogle Scholar
  11. 11.
    H. Li and E. L. Antonsson, “Genetic algorithms in MEMS synthesis,” Proc. 1998 ASME Intl. Mech. Eng. Cong. and Exp. (IMECE ‘98), pp. 299–303.Google Scholar
  12. 12.
    T.J. Hubbard and E.K. Antonsson, “Emergent faces in crystal etching,” J. Microelectromech. Syst., vol. 3, no. 1, pp. 19–28, 1994.CrossRefGoogle Scholar
  13. 13.
    P. M. Osterberg and S. D. Senturia, “Membuilder: An automated 3D solid-model constructionporogram for miecroelectromechanical structures,” Proc. 8th Int’l. Conf. Solid-State Sensors and Actuators (Transducers ‘95/ Eurosensors IX), Stockholm, Sweden, 25–29 Jun 1995, vol. 2, pp. 21–24.Google Scholar
  14. 14.
    Z. Zhu and C. Liu, “Anisotropic Crystalline Etching Simulation using a Continuous Cellular Automata Algorithm,” ASME Symposium on Computer Aided Simulation of MEMS, Anaheim, CA, Nov 1998.Google Scholar
  15. 15.
    G. G. E. Gielen and R. A. Rutenbar, “Computer-aided design of analog and mixed-signal integrated circuits,” Proc. of the IEEE, vol. 88, no. 12, Dec 2000, pp. 1825–1854.CrossRefGoogle Scholar
  16. 16.
    B. Baidya, S. K. Gupta, and T. Mukherjee, “An extraction-based verification methodology for MEMS,” J. Microelectromech. Syst., vol. 11, no. 1, Feb 2002, pp. 2–11.CrossRefGoogle Scholar
  17. 17.
    W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, “Electrostatic Comb Drive of Lateral Polysilicon Resonators,” Sens. and Act. A, 21 (1990) 328–31.CrossRefGoogle Scholar
  18. 18.
    T. Mukherjee, S. Iyer, and G. K. Fedder, “Optimization-based synthesis of microresonators,” Sens. and Act. A, 70 (1998), pp 118–127.CrossRefGoogle Scholar
  19. 19.
    M. Lemkin and B. E. Boser, “A micromachined fully differential lateral accelerometer,” Proceedings of the IEEE 1996 Custom Integrated Circuits Conference, pp. 315–318.Google Scholar
  20. 20.
    Hao Luo, Gang Zhang, L. R. Carley, and G. K. Fedder, “A post-CMOS micromachined lateral accelerometer,” J. Microelectromech. Syst., vol. 11, no. 3, June 2002, pp. 188–195.CrossRefGoogle Scholar
  21. 21.
    T. Mukherjee, Y. Zhou, and G. K. Fedder, “Automated Optimal Synthesis of Microaccelerometers,” Tech. Dig. of Twelfth IEEE Intl. Conf. on Micro Electro Mechanical Systems (MEMS 99), Orlando FL, Jan. 17–21 1999, pp. 326–331.Google Scholar
  22. 22.
    V. Gupta and T. Mukherjee, “Layout Synthesis of CMOS-MEMS Accelerometers,” Tech. Proc. of Third Intl. Conf. on Modeling and Simulation of Microsystems (MSM 2000), San Diego, CA, March 27–29, 2000, pp. 150–153.Google Scholar
  23. 23.
    D. A. Koester, R. Mahadevan, K. W. Markus, Multi-User MEMS Processes (MUMPs) Introduction and Design Rules, Cronos MEMS Business Unit, 3026 Cornwallis Road, Research Triangle Park, NC 27709.Google Scholar
  24. 24.
    S. Iyer, T. Mukherjee and G.K. Fedder, “Multi-Mode Sensitive Layout Synthesis of Microresonators,” First Intl. Conf. on Modeling and Simulation of Microsystems, (MSM 98), Santa Clara CA, April 6–8, 1998.Google Scholar
  25. 25.
    P. E. Gill, W. Murray, M. A. Saunders and M. H. Wright, User’s Guide for NPSOL (Version 4.0): A Fortran Package for Nonlinear Programming, Technical Report SOL 86–2, Stanford University, January 1986.Google Scholar
  26. 26.
    A. Ongkodjojo, and F. E. H. Tay, “Global optimization and design for microelectromechanical systems devices based on simulated annealing,” J. Micromech. Microeng., vol. 12, no. 6, Nov. 2002, pp. 878–897CrossRefGoogle Scholar
  27. 27.
    CaMEL Web Page, http://www.memsrus.org/svcscml.html, Cronos MEMS Business Unit, 3026 Cornwallis Road, Research Triangle Park, NC 27709.Google Scholar
  28. 28.
    T. Mukherjee, “CAD for Integrated MEMS Design,” Proc. Design, Test Integration, and Packaging of MEMS/MOEMS (DTIP 2000), Paris, France, May 9–11, 2000, pp. 3–14, (invited).Google Scholar
  29. 29.
    G. K. Fedder, Simulation of Microelectromechanical Systems, Ph.D. thesis, University of California at Berkeley, September 1994.Google Scholar
  30. 30.
    J. M. Gere and S. P. Timoshenko, Mechanics of Materials, 4th ed., Boston: PWS Publishing Co., 1997.Google Scholar
  31. 31.
    X. Zhang and W. C. Tang, “Viscous Air Damping in Laterally Driven Microresonators,” Sensors and Materials, v. 7, no. 6, 1995, pp.415–430.Google Scholar
  32. 32.
    W. A. Johnson and L. K. Warne, “Electrophysics of Micromechanical Comb Actuators,” J. Microelectromech. Syst., v.4, no.1, Mar 1995, pp. 49–59.CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Tamal Mukherjee
    • 1
  • Gary K. Fedder
    • 1
    • 2
  1. 1.Department of Electrical and Computer EngineeringCarnegie Mellon UniversityPittsburghUSA
  2. 2.The Robotics InstituteCarnegie Mellon UniversityPittsburghUSA

Personalised recommendations