Large-Area Fabrication of Antennas and Nanodiodes

  • Mario BareißEmail author
  • Daniel Kälblein
  • Peter M. Krenz
  • Ute Zschieschang
  • Hagen Klauk
  • Giuseppe Scarpa
  • Bernhard Fabel
  • Wolfgang Porod
  • Paolo Lugli


The conventional fabrication method in semiconductor technology or nanoelectronics is electron beam lithography. We present a new fabrication method that enables the fabrication of high amount microscale and nanoscale devices on various substrates, namely, nanotransfer printing. Using this technique, we produced millions of nanoscale metal-insulator-metal diodes which represent rectifying devices in the terahertz regime and thousands of antenna structures that are sensitive in the wavelength regime of infrared light. The combination of this two (opto)electronic devices forms a rectenna that converts absorbed infrared light into a DC current. With our approach, the fabrication of large arrays of rectennas is possible which leads to applications in the field of infrared detectors or energy harvesting.


Bottom Electrode Electron Beam Lithography Target Substrate Tunneling Diode Adhesion Promoter 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The research leading to these results has received funding from the Institute for Advanced Study (IAS), the International Graduate School for Science and Engineering (IGSSE) at the Technische Universität München, and the German Excellence Cluster “Nanosystems Initiative Munich” (NIM).


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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  • Mario Bareiß
    • 1
    Email author
  • Daniel Kälblein
    • 2
  • Peter M. Krenz
    • 3
  • Ute Zschieschang
    • 2
  • Hagen Klauk
    • 2
  • Giuseppe Scarpa
    • 1
  • Bernhard Fabel
    • 1
  • Wolfgang Porod
    • 3
  • Paolo Lugli
    • 1
  1. 1.Institute for NanoelectronicsTechnische Universität MünchenMunichGermany
  2. 2.Max Planck Institute for Solid State ResearchStuttgartGermany
  3. 3.Center for Nano Science and TechnologyUniversity of Notre DameSouth BendUSA

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