RF Homodyne Interferometric Sensor
Abstract
Homodyne configuration has been the stereo type of the RF interferometers because of its simplicity. Most RF interferometry, especially for measurement purposes in laboratory, has been developed with this structure. RF interferometry has been used for various applications in instrumentation such as non-destructive characterization of material [20] and plasma diagnostics [21]. RF Interferometery is an attractive means for displacement measurement due to its high measurement accuracy and fast operation. Particularly, it has high resolution due to the fact that the displacement is resolved within a fraction of a wavelength of the operating frequency. Previous works based on optical interferometers have been reported for displacement measurements with resolution ranging from micrometer to sub-nanometer [22–24]. Fast and accurate displacement measurement is needed in various engineering applications such as high-speed metrology, position sensing, liquid-level gauging, water flux sensing, and personal health monitoring.
Keywords
Displacement Measurement Quadrature Signal Interferometric Sensor Phase Imbalance Error Correction AlgorithmReferences
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