Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices

Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)


With higher integration, smaller size, and automated processes, sensors and wireless devices have seen dramatic enhancements to their quality, robustness, and reliability. Recent efforts have been made toward developing autonomous, self-powered remote sensor systems that can offer enhanced applicability and performance with cost savings. With the decrease in power requirements for wireless sensors, the application of piezoelectricity to energy harvesting has become viable. The technological challenge of realizing such a system lies in the construction and fabrication of a miniaturized vibration energy harvester. The current design of MEMSscale devices comprises a seismic mass made of silicon connected to the substrate by a thin PZT cantilever beam. Factors relating to power improvement and reliability of the device are discussed by addressing the shape of the cantilever beam, piezoelectric mode, MEMS process, and environmental temperature.


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  1. 1.
    Roundy S, Wright PK, Rabaey, J (2003) A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun 26:1131-1144.CrossRefGoogle Scholar
  2. 2.
    Mitcheson PD, Green TC, Teatman EM, Holmes AS (2004) Architectures for vibration-driven icropower generators. J Micro Sys:13:429-440.CrossRefGoogle Scholar
  3. 3.
    Torah RN, Beeby SP, Tudor MJ, O'Donnel T, Roy S (2006) Kinetic energy harvesting using micro scale electromagnetic generators. In Proceedings of the 17th MicroMechanics Europe, UK.Google Scholar
  4. 4.
    Shen D, Choe SY, Kim DJ (2007) Analysis of piezoelectric materials for energy harvesting devices under highg vibrations. Jap J Appl Phys 46:6755-6760.CrossRefGoogle Scholar
  5. 5.
    Shen D, Park JH, Ajitsaria J, Choe SY, Wikle HC, Kim DJ (2008) Design, fabrication and evaluation of a mems pzt cantilever with an integrated si proof mass for vibration energy harvesting. J Micromech Microeng 18:055017.CrossRefGoogle Scholar
  6. 6.
    Shen D, Park JH, Noh JH, Choe SY, Kim SH, Wikle HC, Kim DJ (2009) Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting. Sens Actuators A 154:103-108.CrossRefGoogle Scholar
  7. 7.
    Marzencki M, Ammar Y, Basrour S (2007) Integrated power harvesting system including a mems generator and a power management circuit. In Proceedings of International Conference on Solid-State Sensors, Actuators and Microsystems:887-890.Google Scholar
  8. 8.
    Fang HB, Liu JQ, Xu ZY, Dong L, Wang L, Chen D, Cai BC, Liu Y (2006) Fabrication an dperformance of mems-based piezoelectric power generator for vibration energy harvesting. Microelect J 37:1280-1284.CrossRefGoogle Scholar
  9. 9.
    Jeon YB, Sood R, Jeong JH, and Kim SG (2005) MEMS power generator with transverse mode thin film pzt. Sen and Actuators A 122:16-22.CrossRefGoogle Scholar
  10. 10.
    Baker J, Roundy S, Wright P (2005) Alternative geometries for increasing power density in vibration energy scavenging for wireless sensor networks. In Proceedings of the 3rd International Energy Conversion Engineering Conference. San Freansico, USA.Google Scholar
  11. 11.
    Torah R, Glynne-Jones, P, Tudor M, O'Donnell T, Roy S, Beeby S (2008) Self-powered autonomous wireless sensor node using vibration energy harvesting. Meas Sci Technol 19:125202.CrossRefGoogle Scholar
  12. 12.
    Lee BS, Lin SC, Wu WJ, Wang XY, Chang PZ, Lee CK (2009) Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J Micromech Microeng 19: 065014.CrossRefGoogle Scholar
  13. 13.
    Ando T, Li X, Nakao S, Kasai T, Tanaka H, Shikida M, Sato K (2005) Fracture toughness measurement of thin-film silicon. Fatigue Fract Eng Mater Struct 28: 687-694.CrossRefGoogle Scholar
  14. 14.
    Zheng X, Zhou Y, Yan Z (2003) Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition. J Mat Res 6: 551-556.CrossRefGoogle Scholar

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© Springer Science + Business Media, LLC 2011

Authors and Affiliations

  1. 1.Materials Research and Education Center, Department of Mechanical EngineeringAuburn UniversityAuburnUSA

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