MEMS Reliability pp 1-7 | Cite as
Introduction: Reliability of MEMS
Abstract
The development of Micro-Electro Mechanical Systems (MEMS) and introduction of MEMS enabled products in the market have made amazing strides in the last two decades; fulfilling a vision of “cheap complex devices of great reliability”. MEMS are integrated micro-scale systems combining electrical, mechanical or other (magnetic, fluidic/thermal/etc.) elements typically fabricated using conventional semiconductor batch processing techniques that range in size from several nanometers to microns or even millimeters [1]. These systems are designed to interact with the external environment either in a sensing or actuation mode to generate state information or control it at a different scale.
Keywords
Failure Mode Actuation Mode Potential Failure Mode Reliability Challenge Product Development EffortReferences
- 1.Senturia, S.D. (2001) Microsystem Design. Dordrecht: Kluwer.Google Scholar
- 2.Bush, V. (July 1945) As We May Think, Atlantic Magazine (http://www.theatlantic.com/magazine/archive/1969/12/as-we-may-think/3881/)
- 3.Bralla, J.G. (1998) Design For Excellence. London, UK: McGraw-Hill Book Co.Google Scholar
- 4.da Silva, M.G., Giasolli, R., Cunningham, S., DeRoo, D. (2002) MEMS design for manufacturability. Sensors Expo. Boston.Google Scholar
- 5.ASME (2003) Course 469: MEMS Reliability Short Course. New York: ASME.Google Scholar
- 6.(2003). INTEGRRAM Metal-Nitride Prototyping Kit – Design Handbook, Metal-Nitride Surface Micromachining. QinetiQ Ltd. & Coventor Sarl.Google Scholar