Piezoelectric-Based Vibration Control pp 183-232 | Cite as
Piezoelectric-Based Systems Modeling
Chapter
First Online:
Abstract
Building upon the preceding chapters in this part, we present a comprehensive treatment of piezoelectric-based systems modeling including lumped-parameters and distributed-parameters representations for both stacked and laminar configurations. The materials given in this chapter shall prepare the readers for vibration-control systems using piezoelectric actuators and sensors discussed extensively in Chap. 9.
Keywords
Mode Shape Piezoelectric Material Virtual Work Piezoelectric Actuator Piezoelectric Layer
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References
- Abu-Hilal M (2003) Forced vibration of Euler-Bernoulli beams by means of dynamic Green functions. J Sound Vib 267:191–207MATHCrossRefGoogle Scholar
- Afshari M, Jalili N (2008) Nanomechanical cantilever biosensors: Conceptual design, recent developments and practical implementation, chapter 13 of biomedical applications of vibration and acoustics for imaging and characterization. ASME Press 13:353–374Google Scholar
- Ballas RG (2007) Piezoelectric multilayer beam bending actuators: Static and dynamic behavior and aspects of sensor integration, SpringerGoogle Scholar
- Bashash S (2008) Modeling and control of piezoactive micro and nano systems. PhD Dissertation, Department of Mechanical Engineering, Clemson University, Clemson, SCGoogle Scholar
- Bashash S, Salehi-Khojin A, Jalili N (2008a) Forced vibration analysis of flexible Euler-Bernoulli beams with geometrical discontinuities. Proceedings of the 2008 American control conference, Seattle, WA, (June 2008)Google Scholar
- Berger R, Gerber Ch, Gimzewski JK (1996) Thermal analysis using micromechanical calorimeter. Appl Phys Lett 69(1):40–42CrossRefGoogle Scholar
- Braun T, Barwich V, Ghatkesar MK, Bredekamp AH, Gerber C, Hegner M, Lang HP (2005) Micromechanical mass sensors for biomolecular detection in a physiological environment. Phys Rev 72:031907Google Scholar
- Chu C-H, Shih W-P, Chung S-Y, Tsai H-C, Shing T-K, Chang P-Z (2007) A low actuation voltage electrostatic actuator for RF MEMS switch applications. J Micromech Microeng 17:1649–1656CrossRefGoogle Scholar
- Dadfarnia M, Jalili N, Liu Z, Dawson DM (2004a) An observer-based piezoelectric control of flexible Cartesian robot arms: theory and experiment. Control Eng Pract 12:1041–1053CrossRefGoogle Scholar
- Dankert H, Dankert J (1995) Technische Mechanik, vol 2. Auflage B.G. Teubner, StuttgartCrossRefGoogle Scholar
- Dareing DW, Thundat T (2005) Simulation of adsorption-induced stress of a microcantilever sensor. J Appl Phys 97:043526CrossRefGoogle Scholar
- Gahlin R, Jacobson S (1998) Novel method to map and quantify wear on a micro-scale. Wear 222:93–102CrossRefGoogle Scholar
- Ge SS, Lee TH, Zhu G (1998a) Asymptotically stable end-point regulation of a flexible SCARA/cartesian robot. IEEE/ASME Trans Mechatron 3(2):138–144CrossRefGoogle Scholar
- Giessibl FJ (2003) Advances in atomic force microscopy. Rev Modern Phys 75:949–983CrossRefGoogle Scholar
- Gonda S, Doi T, Kurosawa T, Tanimura Y, Hisata N, Yamagishi T, Fujimoto H, Yukawa H (1999) Accurate topographic images using a measuring atomic force microscope. Appl Surf Sci 144–145:505–509CrossRefGoogle Scholar
- Grigorov AV, Davis ZJ, Rasmussen PA, Boisen A (2004) A longitudinal thermal actuation principle for mass detection using a resonant microcantilever in a fluid medium. Microelectronic Eng 73–74:881–886CrossRefGoogle Scholar
- Hesselbach J, Ritter R, Thoben R, Reich C, Pokar G (1998) Visual control and calibration of parallel robots for microassembly. Proceedings of SPIE, vol 3519. Boston, MA, pp 50–61Google Scholar
- Jalili N, Laxminarayana K (2004) A review of atomic force microscopy imaging systems: Application to molecular metrology and biological sciences. Mechatronics 14:907–945CrossRefGoogle Scholar
- Jalili N, Dadfarnia M, Dawson DM (2004) A fresh insight into the microcantilever-sample interaction problem in non-contact atomic force microscopy. ASME J Dyn Sys Measur Cont 126(2):327–335CrossRefGoogle Scholar
- Lee H-C, Park J-H, Park Y-H (2007) Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever. Sens Actuators A 136:282–290CrossRefGoogle Scholar
- Lopez SJ, Miribel CP, Montane E, Puig VM, Bota SA, Samitier J, Simu U, Johansson S (2001) High accuracy piezoelectric-based microrobot for biomedical applications. IEEE Symp Emer Technol Factory Autom ETFA 2:603–609Google Scholar
- Mahmoodi SN, Afshari M, Jalili N (2008a) Nonlinear vibrations of piezoelectric microcantilevers for biologically-induced surface stress sensing. J Commun Nonlinear Sci Numer Simul 13:1964–1977CrossRefGoogle Scholar
- Majumdar A, Lai J, Chandrachood M, Nakabeppu O, Wu Y, Shi Z (1995) Thermal imaging by atomic force microscopy using thermocouple cantilever probes. Rev Sci Instrum 66:3584–3592CrossRefGoogle Scholar
- McFarland AW, Poggi MA, Doyle MJ, Bottomley LA, Colton JS (2005) Influence of surface stress on the resonance behavior of microcantilevers. Appl Phys Lett 87:053505CrossRefGoogle Scholar
- Miyahara K, Nagashima N, Ohmura T, Matsuoka S (1999) Evaluation of mechanical properties in nanometer scale using AFM-based nanoindentation tester. Nanostruct Mater 12:1049–1052CrossRefGoogle Scholar
- Moheimani SOR, Fleming AJ (2006) Piezoelectric transducers for vibration control and damping, Springer, New YorkMATHGoogle Scholar
- Nagashima N, Matsuoka S, Miyahara K (1996) Nanoscopic hardness measurement by atomic force microscope. JSME Int J Series A Mech Mater Eng 39:456–462Google Scholar
- Preumont A (2002) Vibration control of active structures: An introduction, 2nd edn. Kluwer Academic Publishers, DordrechtMATHGoogle Scholar
- Rao SS (2007) Vibration of continuous systems, Wiley, Hoboken NJGoogle Scholar
- Ren Q, Zhao Y-P (2004) Influence of surface stress on frequency of microcantilever-based biosensors. Microsyst Technol 10:307–314CrossRefGoogle Scholar
- Salehi-Khojin A, Bashash S, Jalili N (2008) Modeling and experimental vibration analysis of nanomechanical cantilever active probes. J Micromech Microeng 18, 085008:1–11Google Scholar
- Schmoeckel F, Fahlbusch S, Seyfried J, Buerkle A, Fatikow S (2000) Development of a microrobot-based micromanipulation cell in scanning electron microscope (SEM). Proc SPIE 4194:13-20, Boston, MAGoogle Scholar
- Shi L, Plyasunov S, Bachtold A, McEuen PL, Majumdar A (2000) Scanning thermal microscopy of carbon nanotubes using batch-fabricated probes. Appl Phys Lett 77:4295–4297CrossRefGoogle Scholar
- Susuki Y (1996) Novel microcantilever for scanning thermal imaging microscopy. Jpn J Appl Phys 35:L352–L354CrossRefGoogle Scholar
- Thundat T, Warmack RJ, Chen GY, Allison DP (1994) Thermal and ambient-induced deflections of scanning force microscope cantilevers. Appl Phys Lett 64:2894–2898CrossRefGoogle Scholar
- Vora K, Bashash S, Jalili N (2008) Modeling and forced vibration analysis of rod-like solid-state actuators. Proceedings of the 2008 ASME Dynamic Systems and Control Conference (DSCC’08), Ann Arbor, MI (Oct 20–22, 2008)Google Scholar
- Wu G, Ji H, Hansen K, Thundat T, Datar R, Cote R, Hagan MF, Chakraborty AK, Majumdar A (2001) Origin of nanomechanical cantilever motion generated from bimolecular interactions. Proc Natl Acad Sci 98:1560–1564CrossRefGoogle Scholar
- Ziegler C (2004) Cantilever-based biosensors. Anal Bioanal Chem 379:946–959Google Scholar
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