Sputtering yield measurements

  • Hans Henrik Andersen
  • Helge L. Bay
Chapter
Part of the Topics in Applied Physics book series (TAP, volume 47)

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 4.1
    W. R. Grove: Philos. Trans. R. Soc. London, (1852) p. 87Google Scholar
  2. 4.1a
    R. Behrisch (ed.): Sputtering by Particle Bombardment, III, Topics in Applied Physics (Springer, Berlin, Heidelberg, New York 1981) to be publishedGoogle Scholar
  3. 4.2
    J. Plücker: Ann. Phys. Chem. (Leipzig) 103, 88 (1858)Google Scholar
  4. 4.3
    R. Behrisch: Ergeb. Exakten Naturwiss. 35, 295 (1964)Google Scholar
  5. 4.4
    O. Christensen: Thin Solid Films 15, 1 (1973)CrossRefGoogle Scholar
  6. 4.5
    G. Carter, W. A. Grant: Ion Implantation of Semiconductors (Halsted, New York 1976)Google Scholar
  7. 4.6
    G. Dearnaley, J.H. Freeman, R.S. Nelson, J. Stephen (eds.): Ion Implantation (North-Holland, Amsterdam 1973)Google Scholar
  8. 4.7
    H. L. Bay, H. H. Andersen, W.O. Hofer, O. Nielsen: Nucl. Instrum. Methods 132, 301 (1976)CrossRefGoogle Scholar
  9. 4.8
    J. E. Robinson, D. A. Thompson: Phys. Rev. Lett. 33, 1569 (1974)CrossRefGoogle Scholar
  10. 4.9
    J. H. Freeman: In Ion Implantation ed. by G. Dearnaley, J. H. Freeman, R. S. Nelson, J. Stephen (North-Holland, Amsterdam 1973) p. 255Google Scholar
  11. 4.10
    A. Weiss, L. Heldt, W. J. Moore: J. Chem. Phys. 29, 7 (1958)CrossRefGoogle Scholar
  12. 4.11
    R. S. Bhattacharya, C. B. W. Kerdijk, D. Hoonhout, F. W. Saris: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F.P. Viehböck, A. Breth (private publisher, Wien 1977) p. 2193Google Scholar
  13. 4.12
    H. H. Andersen, H. Bay: Radiat. Eff. 13, 67 (1972)Google Scholar
  14. 4.13
    H. L. Bay, J. Roth, J. Bohdansky: J. Appl. Phys. 48, 4722 (1977)CrossRefGoogle Scholar
  15. 4.14
    J. S. Colligon, C. M. Hicks, A.P. Neokleous: Radiat. Eff. 18,119 (1973)Google Scholar
  16. 4.15
    G. Holmbn: Radiat. Eff. 24, 7 (1975)Google Scholar
  17. 4.16
    G. Holmbn, O. Kugler, O. Almén: Nucl. Instrum. Methods 105, 545 (1972)CrossRefGoogle Scholar
  18. 4.17
    O. C. Yonts, D. E. Harrison, Jr.. J. Appl. Phys. 31, 1583 (1960)CrossRefGoogle Scholar
  19. 4.18
    E. Taglauer, W. Heiland, J. Onsgaard: Nucl. Instrum. Method 168, 571 (1980)CrossRefGoogle Scholar
  20. 4.19
    E. Taglauer, U. Beitat, G. Marin, W. Heiland: J. Nucl. Mater. 63, 193 (1976)Google Scholar
  21. 4.20
    H. F. Winters, P. Sigmund: J. Appl. Phys. 45, 4760 (1974)CrossRefGoogle Scholar
  22. 4.21
    T. Hirao, K. Inoue, S. Takayanagi, Y. Yaegashi: Appl. Phys. Lett. 31, 505 (1977)CrossRefGoogle Scholar
  23. 4.22
    R. A. Moline, A. G. Cullins: Appl. Phys. Lett. 26, 551 (1975)CrossRefGoogle Scholar
  24. 4.23
    P. Sigmund: J. Appl. Phys. 50, 7261 (1979)CrossRefGoogle Scholar
  25. 4.24
    R. Kelly, J. B. Sanders: Surf. Sci. 57, 143 (1976)CrossRefGoogle Scholar
  26. 4.25
    P. Blank: Dissertation, München (1977)Google Scholar
  27. 4.26
    P. Blank, K. Wittmaack: Radiat. Eff. 27,29 (1975)Google Scholar
  28. 4.27
    P. Blank, K. Wittmaack, F. Schulz: Nucl. Instrum. Methods 132, 387 (1976)CrossRefGoogle Scholar
  29. 4.28
    E.P. EerNisse: J. Appl. Phys. 42, 480 (1971)CrossRefGoogle Scholar
  30. 4.29
    R. Weissmann, R. Behrisch: Radiat. Eff. 19, 69 (1973)Google Scholar
  31. 4.30
    R. J. MacDonald, D. Haneman: J. Appl. Phys. 37,1609 (1966)CrossRefGoogle Scholar
  32. 4.31
    E.P. EerNisse: Appl. Phys. Lett. 29, 14 (1976)CrossRefGoogle Scholar
  33. 4.32
    G. D. Peterson, E. P. EerNisse: Rev. Sci. Instrum. 47, 1153 (1976)CrossRefGoogle Scholar
  34. 4.33
    O. Almén, G. Bruce: Nucl. Instrum. Methods 11, 257 and 279 (1961)CrossRefGoogle Scholar
  35. 4.34
    H. L. Bay, H. H. Andersen, W. O. Hofer: Radiat. Eff. 28, 87 (1976)Google Scholar
  36. 4.35
    H. L. Bay, H. H. Andersen, W.O. Hofer, O. Nielsen: Appl. Phys. 11, 289 (1976)CrossRefGoogle Scholar
  37. 4.36
    R. Behrisch, B. M. U. Scherzer: Thin Solid Films 19, 247 (1973)CrossRefGoogle Scholar
  38. 4.37
    H. von Seefeld, H. Schmidl, R. Behrisch, B. M. U. Scherzer: J. Nucl. Mater. 63, 215 (1976)Google Scholar
  39. 4.38
    K. Pearmain, B. A. Unvala: Vacuum 25,3 (1975)CrossRefGoogle Scholar
  40. 4.39
    F. Schulz, K. Wittmaack, J. Maul: Radiat. Eff. 18, 211 (1973)Google Scholar
  41. 4.40
    R. P. Gittings, D. V. Morgan, G. Dearnaley: J. Phys. D5, 1654 (1972)CrossRefGoogle Scholar
  42. 4.41
    G. S. Anderson, W.N. Mayer, G. K. Wehner: J. Appl. Phys. 33, 2991 (1962)CrossRefGoogle Scholar
  43. 4.42
    R. P. Edwin: J. Phys. D6, 833 (1973)CrossRefGoogle Scholar
  44. 4.43
    B. Navinšek: J. Appl. Phys. 36,1678 (1965)CrossRefGoogle Scholar
  45. 4.44
    J. Bøttiger, J. A. Davies: Radiat. Eff. 11, 61 (1971)Google Scholar
  46. 4.45
    J. Bøttiger, J. A. Davies, P. Sigmund, K. B. Winterbon: Radiat. Eff. 11, 69 (1971)Google Scholar
  47. 4.46
    E.Arminen, A.Fontell: Ann. Acad. Sci. Fenn. Ser. A No. 357 (1971)Google Scholar
  48. 4.47
    E. Arminen, A. Fontell, V. K. Lindroos: Phys. Status Solidi (a)4, 663 (1971)Google Scholar
  49. 4.48
    A. Fontell, E. Arminen: Can. J. Phys. 47,2405 (1969)Google Scholar
  50. 4.49
    H.J. Smith: Radiat. Eff. 18, 55 and 65 (1973)Google Scholar
  51. 4.50
    R. Behrisch, J. Bottiger, W. Eckstein, J. Roth, B. M. U. Scherzer: J. Nucl. Mater. 56, 365 (1975)CrossRefGoogle Scholar
  52. 4.51
    J. Bøttiger, S. T. Picraux, N. Rud, T. Laursen: J. Appl. Phys. 48, 920 (1977)CrossRefGoogle Scholar
  53. 4.52
    J. Roth, S. T. Picraux, W. Eckstein, J. Bøttiger: J. Nucl. Mater. 63, 120 (1976)Google Scholar
  54. 4.53
    A. W. Tinsley, W. A. Grant, G. Carter, M. J. Nobes: In Ion Implantation in Semiconductors, ed. by I. Ruge and J. Graul (Springer, Berlin, Heidelberg, New York 1971) p. 199Google Scholar
  55. 4.54
    J. L. Whitton, G. Carter, J. N. Baruah, W. A. Grant: Radiat. Eff. 16, 101 (1972)Google Scholar
  56. 4.55
    S. K. Erents, G. M. McCracken: J. Phys. D 2, 1397 (1969)CrossRefGoogle Scholar
  57. 4.56
    G. M. McCracken, D. K. Jeffries, P. Goldsmith: Inst. Phys. Conf. Ser. 5, 149 (1968)Google Scholar
  58. 4.57
    G. M. McCracken: Rep. Prog. Phys. 38, 241 (1975)CrossRefGoogle Scholar
  59. 4.57a
    R. Behrisch (ed.): Sputtering by Particle Bombardment, II, Topics in Applied Physics (Springer, Berlin, Heidelberg, New York 1981) to be publishedGoogle Scholar
  60. 4.58
    B. M. U. Scherzer, R. Behrisch, W. Eckstein, U. Littmark, J. Roth, M. K. Sinha: J. Nucl. Mater. 63, 100 (1976)Google Scholar
  61. 4.59
    J. M. Fluit, P. K. Rol: Physica 30, 857 (1964)CrossRefGoogle Scholar
  62. 4.60
    H. Schirrwitz: Beitr. Plasmaphys. 2, 188 (1962)Google Scholar
  63. 4.61
    R. Behrisch, J. Bohdansky, G. H. Oetjen, J. Roth, G. Schilling, H. Verbeek: J. Nucl. Mater. 60, 321 (1976)CrossRefGoogle Scholar
  64. 4.62
    J. Bohdansky, H. L. Bay, J. Roth: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F.P. Viehböck, A. Breth (private publisher, Wien 1977) p. 1509Google Scholar
  65. 4.63
    K. Akaishi, A. Kiyahara, Z. Kabeya, M. Komizo, T. Gotoh: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F.P. Viehbbck, A. Breth (private publisher, Wien 1977) p. 1477Google Scholar
  66. 4.64
    A. I. Aizentson, V. S. Karpukhin: Zh. Tekh. Fiz. 42, 2607 (1972); Engl. transl.: Sov. Phys.Tech. Phys. 17, 2025 (1973)Google Scholar
  67. 4.65
    T. Narusawa, O. Tsukakoshi, T. Satake, H. Mizuno, H. Ohtsuka, K. Sone, S. Komiya: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F.P. Viehböck, A. Breth (private publisher, Wien 1977) p. 371Google Scholar
  68. 4.66
    H.Ohtsuka, R. Yamada, K. Sone, M. Saidoh, T. Abe: J. Nucl. Mater. 76,188 (1978)CrossRefGoogle Scholar
  69. 4.67
    R. G. Hart, C. B. Cooper: J. Vac. Sci. Technol. 13, 553 (1976)CrossRefGoogle Scholar
  70. 4.68
    D. McKeown: Rev. Sci. Instrum. 32, 133 (1961)CrossRefGoogle Scholar
  71. 4.69
    W. H. Hayward, A. R. Wolter: J. Appl. Phys. 40, 2911 (1969)CrossRefGoogle Scholar
  72. 4.70
    H. H. Andersen, H. L. Bay: Radiat. Eff. 19, 139 (1973)Google Scholar
  73. 4.71
    H. H. Andersen, H. L. Bay: J. Appl. Phys. 45, 953 (1974)CrossRefGoogle Scholar
  74. 4.72
    H. H. Andersen, H. L. Bay: J. Appl. Phys. 46, 1919 (1975)CrossRefGoogle Scholar
  75. 4.73
    H. H. Andersen, H. L. Bay: J. Appl. Phys. 46, 2416 (1976)CrossRefGoogle Scholar
  76. 4.74
    H. H. Andersen: Radiat. Eff. 19, 257 (1973)Google Scholar
  77. 4.75
    E. P. EerNisse: J. Appl. Phys. 43, 1330 (1972)CrossRefGoogle Scholar
  78. 4.76
    E. P. EerNisse: J. Nucl. Mater. 53, 226 (1974)CrossRefGoogle Scholar
  79. 4.77
    E. P. EerNisse: J. Vac. Sci. Technol. 11, 408 (1974)CrossRefGoogle Scholar
  80. 4.78
    E. P. EerNisse: J. Vac. Sci. Technol. 12, 564 (1975)CrossRefGoogle Scholar
  81. 4.79
    H. H. Andersen, J. Bøttiger H. Knudsen (eds.): Proc. 4th Int. Conf. on Ion-Beam Analysis (North-Holland, Amsterdam 1980); Nucl. Instrum. Methods 168 (1980)Google Scholar
  82. 4.80
    J. W. Mayer, J. F. Ziegler (eds.): Ion Beam Surface Layer Analysis (Elsevier, Lausanne 1974)Google Scholar
  83. 4.81
    O. Meyer, G. Linker, F. Käppeler (eds.): Ion Beam Surface Layer Analysis (Plenum, New York 1975)Google Scholar
  84. 4.82
    E. A. Wolicki, J. W. Butler, P. A. Treado (eds.): Proc. 3rd Intern. Conf. Ion Beam Analysis (North-Holland, Amsterdam 1978); Nucl. Instrum. Methods 149 (1978)Google Scholar
  85. 4.83
    H. H. Andersen, H. Knudsen, P. Møller Petersen: J. Appl. Phys. 49, 5638 (1978)CrossRefGoogle Scholar
  86. 4.84
    R. Behrisch, R. Weissmann: Phys. Lett. 30A, 506 (1970)Google Scholar
  87. 4.85
    Z. L. Liau, W. L. Brown, R. Homer, J. M. Poate: Appl. Phys. Lett. 30, 626 (1977)CrossRefGoogle Scholar
  88. 4.86
    J. M. Poate, W. L. Brown, R. Homer, W. M. Augustyniak: Nucl. Instrum. Methods 132, 345 (1976)CrossRefGoogle Scholar
  89. 4.87
    W. Eckstein, B. M. U. Scherzer, H. Verbeek: Radiat. Eff. 18, 135 (1973)Google Scholar
  90. 4.88
    H. H. Andersen: Unpublished (1976)Google Scholar
  91. 4.89
    P. Sigmund: Phys. Rev. 184, 383 (1969)CrossRefGoogle Scholar
  92. 4.90
    F. Folkmann: In Ion Beam Surface Layer Analysis ed. by O. Meyer, G. Linker, F. Käppeler (Plenum, New York 1975) p. 695Google Scholar
  93. 4.91
    J. Bøttiger: J. Nucl. Mater. 78, 161 (1978)CrossRefGoogle Scholar
  94. 4.92
    M. A. Kirk, R. A. Conner, D. G. Wozniak, L. R. Greenwood, R. L. Malewicki, R. R. Heinrich Phys. Rev. B19, 87 (1979)Google Scholar
  95. 4.93
    G. S. Anderson: J. Appl. Phys. 40, 2884 (1969)CrossRefGoogle Scholar
  96. 4.94
    C. R. Fritzsche, W. Rothemund: Appl. Phys. 7, 39 (1975)CrossRefGoogle Scholar
  97. 4.95
    J. Kirschner, H. W. Etzkorn: Appl. Surf. Sci. 3, 251 (1979)CrossRefGoogle Scholar
  98. 4.96
    J. Tardy, J. Pivot, J. P. Dupin, A. Cachard: In Proc. 7th Int. Yacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehblick, A. Breth (private publisher, Wien 1977) p. 1481Google Scholar
  99. 4.97
    P. Mertens: Nucl. Instrum. Methods 132, 307 (1976)CrossRefGoogle Scholar
  100. 4.98
    D. B. Medved, H. Poppa: J. Appl. Phys. 33, 1759 (1962)CrossRefGoogle Scholar
  101. 4.99
    D. Fuller, J. S. Colligon, J. S. Williams: Surf. Sci. 54, 647 (1976)CrossRefGoogle Scholar
  102. 4.100
    H. Krdutle: Nucl. Instrum. Methods 137, 553 (1976)CrossRefGoogle Scholar
  103. 4.101
    C. R. Fritzsche, W. Rothemund: J. Electrochem. Soc. 119, 1243 (1972)Google Scholar
  104. 4.102
    D. W. Ormond, E. A. Irene, J. E. E. Baglin, B. L. Crowder:In Ion Implantation in Semiconductors, ed. by F. Chernow, J. A. Borders, D. K. Brice (Plenum, New York 1977) p. 305Google Scholar
  105. 4.103
    E. P. EerNisse, C. B. Norris: J. Appl. Phys. 45, 5196 (1975)CrossRefGoogle Scholar
  106. 4.104
    W. Primak: The Compacted State of Vitreous Silica (Gordon and Breach, New York 1975)Google Scholar
  107. 4.105
    G. J. Ogilvie, M. J. Ridge: J. Phys. Chem. Solids 10, 217 (1959)CrossRefGoogle Scholar
  108. 4.106
    R. L. Hines, R. Waller: J. Appl. Phys. 32, 202 (1961)CrossRefGoogle Scholar
  109. 4.107
    H. Bach: Nucl. Instr. Methods 84, 4 (1970)CrossRefGoogle Scholar
  110. 4.108
    H. Bach: Z. Naturforsch. 27a, 333 (1972)Google Scholar
  111. 4.109
    H. Bach: Int. J. Mass Spectrom. and Ion Phys. 9, 247 (1972)CrossRefGoogle Scholar
  112. 4.110
    H. Bach, J. Kitzmann, H. Schröder: Radiat. Eff. 21, 31 (1974)Google Scholar
  113. 4.111
    K. Tsunoyama, Y. Ohashi, T. Suzuki, K. Tsuruoka: Jpn. J. Appl. Phys. 13, 1683 (1974)Google Scholar
  114. 4.112
    K. Tsunoyama, T. Suzuki, Y. Ohashi: Jpn. J. Appl. Phys. 15, 349 (1976)Google Scholar
  115. 4.113
    T. Kimura, J. Kobayashi, S. Okuda, H. Akimune: Jpn. J. Appl. Phys. 15, 2479 (1976)Google Scholar
  116. 4.114
    R. Kelly: J. Appl. Phys. 39, 5298 (1968)CrossRefGoogle Scholar
  117. 4.115
    L. Q. Nghi, R. Kelly: Can. J. Phys. 48, 137 (1970)Google Scholar
  118. 4.116
    J. W. Guthrie, R. S. Blewer: Rev. Sci. Instrum. 43, 654 (1972)CrossRefGoogle Scholar
  119. 4.117
    E. H. Sondheimer: Adv. Phys. 1, 1 (1952)Google Scholar
  120. 4.118
    H. Fetz: Z. Phys. 119, 590 (1942)CrossRefGoogle Scholar
  121. 4.119
    H. G. Scott: J. Appl. Phys. 30, 2011 (1962)CrossRefGoogle Scholar
  122. 4.120
    V. Teodosić: Appl. Phys. Lett. 9, 209 (1966)CrossRefGoogle Scholar
  123. 4.121
    B. Navingek, G. Carter: In Physics of Ionized Gases 1970. Contributed Papers, ed. by B. Navingek (Institute of Physics, Ljubljana 1970) p. 65Google Scholar
  124. 4.122
    D. K. Murti, R. Kelly: Thin Solid Films 33, 149 (1976)CrossRefGoogle Scholar
  125. 4.123
    T. E. Parker, R. Kelly: J. Phys. Chem. Solids 36, 377 (1975)CrossRefGoogle Scholar
  126. 4.124
    K. H. Ecker, K. L. Merkle: Phys. Rev. B18, 1020 (1978)Google Scholar
  127. 4.125
    S. S. Johar, D. A. Thompson: Surf. Sci. 90, 310 (1979)CrossRefGoogle Scholar
  128. 4.126
    J. M. Walls, R. M. Boothby, H. N. Southworth: Surf. Sci. 61, 419 (1976)CrossRefGoogle Scholar
  129. 4.127
    J. M. Walls, A. D. Martin, H. N. Southworth: Surf. Sci. 50, 360 (1975)CrossRefGoogle Scholar
  130. 4.128
    J. M. Walls, H. N. Southworth, E. Bram: Vacuum 24, 471 (1974)CrossRefGoogle Scholar
  131. 4.129
    R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (eds.): Proc. 7th Int. Yacuum Congress and 3rd Int. Conf on Solid Surfaces (private publishers, Wien 1977)Google Scholar
  132. 4.130
    A. Benninghoven, C. A. Evans, Jr., R. A. Powell, R. Shimizu, H. A. Storms (eds.): Secondary Ion Mass Spectrometry (SIMS) II, Springer Ser. Chem. Phys., Vol. 9 (Springer, Berlin, Heidelberg, New York 1980)Google Scholar
  133. 4.131
    G. C. Nelson: J. Vac. Sci. Technol. 13, 974 (1976)CrossRefGoogle Scholar
  134. 4.132
    W. L. Harrington, R. E. Honig, A. M. Goodman, R. Williams: Appl. Phys. Lett. 24, 644 (1975)CrossRefGoogle Scholar
  135. 4.133
    R. Behrisch, B. M. U. Scherzer, P. Staib: Thin Solid Films 19, 57 (1973)CrossRefGoogle Scholar
  136. 4.134
    W. K. Chu, J. K. Howard, R. F. Lever: J. Appl. Phys. 47, 4500 (1976)CrossRefGoogle Scholar
  137. 4.135
    C. M. Garner, Y. D. Shen, J. S. Kim, G. L. Pearson, W. E. Spicer, J. S. Harris, Jr., D. D. Edwall: J. Appl. Phys. 48, 3147 (1977)CrossRefGoogle Scholar
  138. 4.136
    H. Goretzki, A. Mühlratzer, J. Nickl: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (private publisher, Wien 1977) p. 2387Google Scholar
  139. 4.137
    K. Goto, T. Koshikawa, K. Ishikawa, R. Shimuzu: In Proc. 7th Intern. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (private publisher, Wien 1977) p. 1493Google Scholar
  140. 4.138
    S. Hofmann, J. Erlewein, A. Zalar: Thin Solid Films 43, 275 (1977)CrossRefGoogle Scholar
  141. 4.139
    P. H. Holloway: Surf. Sci. 66, 479 (1977)CrossRefGoogle Scholar
  142. 4.140
    T. Koshikava, K. Goto, N. Saeki, R. Shimizu: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (private publisher, Wien 1977) p. 1489Google Scholar
  143. 4.141
    M. Ono, Y. Takasu, K. Nakayama, T. Yamashina: Surf. Sci. 26, 313 (1971)CrossRefGoogle Scholar
  144. 4.142
    A. van Oostrom: J. Vac. Sci. Technol. 13, 225 (1976)Google Scholar
  145. 4.143
    D. T. Quinto, V. S. Sundaram, W. D. Robertson: Surf. Sci. 28, 504 (1971)CrossRefGoogle Scholar
  146. 4.144
    L. E. Rehn, P. R. Okamoto, D. I. Potter, H. Wiedersich: J. Nucl. Mater. 74, 242 (1978)CrossRefGoogle Scholar
  147. 4.145
    J. Roth, J. Bohdansky, W. O. Hofer, J. Kirschner: In Plasma Wall Interactions (Pergamon, London 1977) p. 308Google Scholar
  148. 4.146
    H. Shimizu, M. Ono, K. Nakayama: Surf. Sci. 36, 817 (1973)CrossRefGoogle Scholar
  149. 4.147
    J. N. Smith, Jr., C. H. Meyer, Jr., J. K. Layton: J. Appl. Phys. 46, 4291 (1975)CrossRefGoogle Scholar
  150. 4.148
    J. N. Smith, Jr., C. H. Meyer, Jr., J. K. Layton: Nucl. Technol. 29, 318 (1976)Google Scholar
  151. 4.149
    J. N. Smith, Jr., C. H. Meyer, Jr., J. K. Layton: J. Nucl. Mater. 67, 234 (1977)CrossRefGoogle Scholar
  152. 4.150
    M. L. Tarng, G. K. Wehner: J. Vac. Sci. Technol. 8, 23 (1971)CrossRefGoogle Scholar
  153. 4.151
    M. L. Tarng, G. K.Wehner: J. Appl. Phys. 42, 2449 (1971)CrossRefGoogle Scholar
  154. 4.152
    M. L. Tarng, G. K. Wehner: J. Appl. Phys. 43, 2268 (1972)CrossRefGoogle Scholar
  155. 4.153
    L. A. West: J. Vac. Sci. Technol. 13, 198 (1976)CrossRefGoogle Scholar
  156. 4.154
    C. E. KenKnight, G. K. Wehner: J. Appl. Phys. 35, 322 (1964)CrossRefGoogle Scholar
  157. 4.155
    A. Benninghoven: Z. Angew. Phys. 27, 51 (1969)Google Scholar
  158. 4.156
    W. O. Hofer, H. Liebl: Appl. Phys. 8, 359 (1975); In Ion Beam Surface Layer Analysis, ed. by O. Meyer, G. Linker, F. Käppeler (Plenum, New York 1976) p. 659CrossRefGoogle Scholar
  159. 4.157
    W. O. Hofer, P. J. Martin: Appl. Phys. 16, 271 (1978)CrossRefGoogle Scholar
  160. 4.158
    H. Oechsner, H. Schoof, E. Stumpe: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehblick, A. Breth (private publisher, Wien 1977) p. 1497; Surf. Sci. 76, 343 (1978)Google Scholar
  161. 4.159
    M. Braun, B. Emmoth, R. Buchta: Radiat. Eff. 28, 77 (1976)Google Scholar
  162. 4.160
    H. M. Windawi: Surf. Sci. 55, 573 (1976)CrossRefGoogle Scholar
  163. 4.161
    H. H. Andersen: Appl. Phys. 18, 131 (1979)CrossRefGoogle Scholar
  164. 4.162
    K. Wittmaack: In Inelastic Ion-Surface Collisions, ed. by N. H. Tolk, J. C. Tully, W. Heiland, C. W. White (Academic, New York 1977) p. 153Google Scholar
  165. 4.163
    R. P. Stein, F. C. Hurlbut: Phys. Rev. 123, 790 (1961)CrossRefGoogle Scholar
  166. 4.164
    J. M. Fluit, L. Friedman, H. J. M. Boerbom, J. Kistemaker: J. Chem. Phys. 35, 1143 (1961)CrossRefGoogle Scholar
  167. 4.165
    C. P. Können, J. Grosser, A. Haring, A. E. de Vries, J. Kistemaker: Radiat. Eff. 21, 171 (1974)Google Scholar
  168. 4.166
    R. E. Honig: J. Appl. Phys. 29, 549 (1958)CrossRefGoogle Scholar
  169. 4.167
    J. Comas, C. B. Cooper: J. Appl. Phys. 38, 2956 (1967)CrossRefGoogle Scholar
  170. 4.168
    H. Oechsner: Phys. Rev. Lett. 24, 583 (1970)CrossRefGoogle Scholar
  171. 4.169
    H. Oechsner: Z. Phys. 238, 433 (1970)CrossRefGoogle Scholar
  172. 4.170
    H. Oechsner: Z. Phys. 261, 37 (1973)CrossRefGoogle Scholar
  173. 4.171
    H. Oechsner, W. R. Gesang: Phys. Lett. 39A, 236 (1971)Google Scholar
  174. 4.172
    H. Oechsner, L. Reichert: Phys. Lett. 23, 90 (1966)CrossRefGoogle Scholar
  175. 4.173
    R. V. Stuart, G. K. Wehner: J. Appl. Phys. 35, 1819 (1964)CrossRefGoogle Scholar
  176. 4.174
    J. R. Woodyard, C. B. Cooper: J. Appl. Phys. 35, 1107 (1964)CrossRefGoogle Scholar
  177. 4.175
    F. Bernhardt, H. Oechsner, E. Stumpe: Nucl. Instrum. Methods 132, 329 (1976)CrossRefGoogle Scholar
  178. 4.176
    J. W. Coburn, E. Kay: Appl. Phys. Lett. 19, 350 (1971)CrossRefGoogle Scholar
  179. 4.177
    J. W. Coburn, E. Taglauer, E. Kay: J. Appl. Phys. 45, 1779 (1974)CrossRefGoogle Scholar
  180. 4.178
    W. Gerhard, H. Oechsner: Z. Phys. B22, 41 (1975)Google Scholar
  181. 4.179
    H. Oechsner, W. Gerhard: Surf. Sci. 44, 480 (1974)CrossRefGoogle Scholar
  182. 4.180
    H. Oechsner, E. Stumpe: Appl. Phys. 14, 43 (1977)CrossRefGoogle Scholar
  183. 4.181
    H. Oechsner, K. Rühe, E. Stumpe: Surf. Sci. 85, 289 (1979)CrossRefGoogle Scholar
  184. 4.182
    R. Bruckmüller, W. Husinsky, P. Blum: In Proc. 7th I nt. Vacuum Congress and 3rd I nt. Conf. on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (private publisher, Wien 1977) p. 1469Google Scholar
  185. 4.183
    D. Hammer, E. Benes, P. Blum, W. Husinsky: Rev. Sci. Instrum. 47, 1178 (1976)CrossRefGoogle Scholar
  186. 4.184
    W. Husinsky, R. Bruckmüller, P. Blum: Nucl. Instrum. Methods 170, 287 (1980)CrossRefGoogle Scholar
  187. 4.185
    A. Elbern: In Plasma Wall Interactions (Pergamon, London 1977) p. 489Google Scholar
  188. 4.186
    A. Elbern, P. Mioduszewski, E. Hintz: In Proc. 7th Int. Vacuum Congress and 3rd Int. Conf on Solid Surfaces, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, A. Breth (private publisher, Wien 1977) p. 1473Google Scholar
  189. 4.187
    B. Schweer, H. L. Bay: In Proc. 4th Int. Conf. Solid Surfaces and 3rd European Conf. Surface Science, Societé Francaise du Vide Paris (1980) p. 1349Google Scholar
  190. 4.188
    P. Bogen, E. Hintz: Comm. Plasma Phys. Cont. Fusion 4, 115 (1978)Google Scholar
  191. 4.189
    K. Wittmaack: Nucl. Instrum. Methods 168, 343 (1980)CrossRefGoogle Scholar
  192. 4.190
    T. Ishitani, R. Shimizu: Appl. Phys. 6, 277 (1975)CrossRefGoogle Scholar
  193. 4.191
    A. R. Krauss, D. M. Gruen: J. Nucl. Mater. 63, 380 (1976)Google Scholar
  194. 4.192
    P. Mertens: Thesis. Berlin (1975)Google Scholar
  195. 4.193
    H. H. Andersen, P. Tykesson: IEEE Trans. Nucl. Sci. NS22, 1632 (1975)Google Scholar
  196. 4.194
    V. E. Krohn, Jr.: J. Appl. Phys. 33, 3523 (1962)CrossRefGoogle Scholar
  197. 4.195
    R. Middleton, C. T. Adams: Nucl. Instrum. Methods 118, 329 (1974)CrossRefGoogle Scholar
  198. 4.196
    H. Sporn: Z. Phys. 112, 279 (1939)Google Scholar
  199. 4.197
    N. H. Tolk, J. C. Tully, W. Heiland, C. W. White (eds.):Inelastic Ion-Surface Collisions (Academic, New York 1977)Google Scholar
  200. 4.198
    N. H. Tolk, I. S. T. Tsong, C. W. White: Anal. Chem. 49,16A (1977)CrossRefGoogle Scholar
  201. 4.199
    S. S. Pop, I. P. Zaposochnyi, A. I. Imre, S. A. Evdokimov, A. I. Daschenko: Zh. Eksp. Teor. Fiz. 73, 90 (1977); Engl. transl.: Sov. Phys.-JETP 46, 46 (1977)Google Scholar
  202. 4.200
    S. K. Erents, G. M. McCracken: J. Appl. Phys. 44, 3139 (1973)CrossRefGoogle Scholar
  203. 4.201
    S. K. Erents, G. M. McCracken: Culham Laboratory Report CLM-P360 (1973)Google Scholar
  204. 4.202
    M. W. Thompson, B. W. Farmery, P. A. Newson: Philos. Mag. 18, 361 (1968)Google Scholar
  205. 4.203
    M. R. Weller, T. A. Tombrello: Radiat. Eff. 49, 239 (1980)Google Scholar
  206. 4.204
    W. Krüger, K. Rödelsperger, A. Scharmann: Z. Phys. 262, 315 (1973)CrossRefGoogle Scholar
  207. 4.205
    J. J. Cuomo, R. J. Gambino, J. M. E. Harper, J. D. Kuptsis, J. C. Webber: J. Vac. Sci. Technol. 15, 281 (1978)CrossRefGoogle Scholar
  208. 4.206
    H. L. Bay, J. BohdanskyZ, W. O. Hofer, J. Roth: Appl. Phys. 21, 327 (1980)CrossRefGoogle Scholar
  209. 4.207
    V. E. Dubinskii, S. Ya. Lebedev: Fiz. Tverd. Tela 12, 1906 (1970); Engl. transl.: Sov. Phys.Solid State 12, 1516 (1971)Google Scholar
  210. 4.208
    S. Ya. Lebedev, G. V. Lysova: Fiz. Tverd. Teta 17, 3068 (1975); Engl. trans].: Sov. Phys.-Solid State 17, 2014 (1976)Google Scholar
  211. 4.209
    R. J. MacDonald, J. Reid: J. Phys. F4, 1832 (1974)CrossRefGoogle Scholar
  212. 4.210
    L. T. Chadderton, A. Johansen, L. Sarholt-Kristensen, H. Schumacher: Phys. Lett. 40A, 231 (1972)CrossRefGoogle Scholar
  213. 4.211
    L. T. Chadderton, A. Johansen, S. Steenstrup, L. Sarholt-Kristensen: Radiat. Eff. 17, 281 (1973)Google Scholar
  214. 4.212
    W. O. Hofer: Radiat. Eff. 21, 141 (1974)Google Scholar
  215. 4.213
    M. Koedam: Thesis, Utrecht (1961) and Physica 24, 692 (1962)Google Scholar
  216. 4.214
    G. E. Chapman, J. C. Kelly: J. Sci. Instrum. 44, 261 (1967)CrossRefGoogle Scholar
  217. 4.215
    K. Rödelsperger, W. Krüger, A. Scharmann: Z. Phys. 269, 83 (1974)CrossRefGoogle Scholar
  218. 4.216
    K. Takatsu, T. Toda: In Proc. Vht Intern. Conf. Ionization Phenomena in Gases, ed. by Maecker (North-Holland, Amsterdam 1962) p. 96Google Scholar
  219. 4.217
    L. L. Tongson, C. B. Cooper: Radiat. Eff. 24, 187 (1975)Google Scholar
  220. 4.218
    J. Bohdansky, J. Roth, M. K. Sinha, W. Ottenberger: J. Nucl. Mater. 63, 115 (1976)Google Scholar
  221. 4.219
    E. P. EerNisse, D. K. Brice: Nucl. Instrum. Methods 132, 363 (1976)CrossRefGoogle Scholar
  222. 4.220
    W. O. Hofer, H. L. Bay, P. J. Martin: J. Nucl. Mater. 76, 156 (1978)CrossRefGoogle Scholar
  223. 4.221
    R. Behrisch, O. K. Harling, M. T. Thomas, R. L. Brodzinski, L. H. Jenkins, G. J. Smith, J. F. Wendelkeng, M. J. Saltmarsh, M. Kaminsky, S. K. Das, C. M. Logan, R. Meisenheimer, J. E. Robinson, M. Shimotomai, D. A. Thompson: J. Appl. Phys. 48, 3914 (1977)CrossRefGoogle Scholar
  224. 4.222
    O. K. Harling, M. T.Thomas, R. L. Brodzinski, L. A. Ranticelli: Phys. Rev. Lett. 34, 1340 (1975)CrossRefGoogle Scholar
  225. 4.223
    O. K. Harling, M. T. Thomas, R. L. Brodzinski, L. A. Ranticelli: J. Nucl. Mater. 63, 422 (1976)Google Scholar
  226. 4.224
    L. H. Jenkins, T. S. Noggle, R. E. Reed, M. J. Saltmarsh, G. S. Smith: Appl. Phys. Lett. 26, 426 (1975)CrossRefGoogle Scholar
  227. 4.225
    M. Kaminsky, S. K. Das: J. Nucl. Mater. 60, 111 (1976)CrossRefGoogle Scholar
  228. 4.226
    K. L. Merkle, P. P. Pronko: J. Nucl. Mater. 53, 231 (l974)CrossRefGoogle Scholar
  229. 4.227
    H. H. Andersen, F. Besenbacher, P. Goddiksen: In Symposium on Sputtering, Institute für Allgemeine Physik, ed. by P. Varga, G. Betz, F. P. Viehbbck (Technical University, Vienna 1980) p. 446Google Scholar
  230. 4.228
    K. Rödelsperger, A. Scharmann: Nucl. Instrum. Methods 132, 355 (1976)CrossRefGoogle Scholar
  231. 4.229
    K. H. Ecker: Radiat. Eff. 23, 171 (1974)Google Scholar
  232. 4.230
    E. H. Hasseltine, N. T. Olson, H. P. Smith: J. Appl. Phys. 39,1417 (1968)CrossRefGoogle Scholar
  233. 4.231
    W. O. Hofer: Dissertation, München (1972)Google Scholar
  234. 4.232
    W. O. Hofer: Radiat. Eff. 19, 263 (1973)Google Scholar
  235. 4.233
    W. O. Hofer: Mikrochim. Acta Suppl. 7, 185 (1977).Google Scholar
  236. 4.234
    M. Kaminsky, S. K. Das: J. Nucl. Mater. 53, 162 (1974)CrossRefGoogle Scholar
  237. 4.235
    M. Kaminsky, J. H. Peavey, S. K. Das: Phys. Rev. Lett. 32, 599 (1974)CrossRefGoogle Scholar
  238. 4.236
    G. K. Wehner: Appl. Phys. Lett. 30, 185 (1977)CrossRefGoogle Scholar
  239. 4.237
    M. Braun, B. Emmoth: Appl. Phys. Lett. 29, 545 (1976)CrossRefGoogle Scholar
  240. 4.238
    D. M. Gruen, S. L. Gaudisio, R. L. McBeth, J. L. Lerner: J. Chem. Phys. 60, 89 (1974)CrossRefGoogle Scholar
  241. 4.239
    J. Bates, D. M. Gruen, R. Varma: Rev. Sci. Instrum. 48, 1506 (1976)CrossRefGoogle Scholar
  242. 4.240
    G. E. Thomas, E. E. de Kluizenaar, W. J. van Kollenburg, L. C. Bastings: Anal. Chem. 47, 2357 (1975)CrossRefGoogle Scholar
  243. 4.241
    C. Cassignol, G. Rang: C. R. Acad. Sci. 248, 1988 (1959)Google Scholar
  244. 4.242
    W. J. Moore, C. D. O'Brian, A. Lindner: Ann. N. Y. Acad. Sci. 67, 600 (1957)Google Scholar
  245. 4.243
    C. H. Robison: J. Appl. Phys. 39, 3441 (1968)CrossRefGoogle Scholar
  246. 4.244
    V. D. Tischenko: Radiotekh. Elektron. [Engl. transl.: Rad. Eng. Electron. Phys. (USSR) 13, 1431 (l968)]Google Scholar
  247. 4.245
    V. M. Agranovich, O. I. Kapusta, S. Ya. Lebedev, L. P. Semenov: Fiz. Tverd. Tela 11, 2816 (1969); Engl. transl.: Sov. Phys.-Solid State 11, 2280 (1970)Google Scholar
  248. 4.246
    H. Patterson, D. H. Tomlin: Proc. Roy. Soc. (London) A265, 474 (1962)Google Scholar
  249. 4.247
    I. Reid, B. W. Farmery, M. W. Thompson: Nucl. Instrum. Methods 132, 317. (1976)CrossRefGoogle Scholar
  250. 4.248
    M. W. Thompson: Phys. Lett. 6, 24 (1963)CrossRefGoogle Scholar
  251. 4.249
    J. F. Cuderman, J. J. Brady: Surf. Sci. 10, 410 (1968)CrossRefGoogle Scholar
  252. 4.250
    R. S. Nelson: Radiat. Eff. 7, 263 (1971)Google Scholar
  253. 4.251
    R. S. Nelson, M. W. Thompson: Proc. Roy. Soc. (London) A259,458 (1961)Google Scholar
  254. 4.252
    R. S. Nelson, M. W. Thompson, H. Montgomery: Philos. Mag. 7, 1385 (1962)Google Scholar
  255. 4.253
    R. S. Nelson, M. W. Thompson: Phys. Lett. 2, 124 (1962)CrossRefGoogle Scholar
  256. 4.254
    R. S. Nelson: Philos. Mag. 8, 693 (1963)Google Scholar
  257. 4.255
    Z. E. Switkowski, F. M. Mann, D. W. Kneff, R. W. Ollerhead, T. A. Tombrello: Radiat. Eff. 29, 65 (1976)Google Scholar
  258. 4.256
    R. W. Ollerhead, F. M. Mann, D. W. Kuff, Z. E. Switkowski, T. A. Tombrello: Phys. Rev. Lett. 36, 439 (1976)CrossRefGoogle Scholar
  259. 4.257
    J. P. Biersack, D. Fink, P. Mertens: J. Nucl. Mater. 53, 194 (1974)CrossRefGoogle Scholar
  260. 4.258
    R. Gregg, T. A. Tombrello: Radiat. Eff. 35, 243 (1978)Google Scholar
  261. 4.259
    C. H. Weijsenfeld: In Proc. 6 ieme Intern. Conf. Phénomènes d'Ionization dans les Gaz, Vol. 11, Paris (1963) p. 43Google Scholar
  262. 4.260
    C. H. Weijsenfeld: Philips Res. Rep. Suppl. No. 2 (1967)Google Scholar
  263. 4.261
    S. A. Drentje: Phys. Lett. 25A, 433 (1967) and Thesis, Groningen (1968)Google Scholar
  264. 4.262
    V. M. Bukhanov, V. G. Morozov, V. E. Yurasova: Radiat. Eff. 19, 215 (1973)Google Scholar
  265. 4.263
    V. M. Bukhanov, D. D. Odintsov, V. E. Yurasova: Fiz. Tverd. Tela 12, 2425 (1970); Engl. trans].: Sov. Phys.-Solid State 12, 1937 (1971)Google Scholar
  266. 4.264
    R. G. Musket, H. G. Smith, Jr.: J. Appl. Phys. 39, 3579 (1968)CrossRefGoogle Scholar
  267. 4.265
    N. T. Olson, H. P. Smith, Jr.: Phys. Rev. 157, 241 (1967)CrossRefGoogle Scholar
  268. 4.266
    H. P. Smith, Jr., R. G. Musket: J. Appl. Phys. 40, 3859 (1969)CrossRefGoogle Scholar
  269. 4.267
    V. E. Yurasova: In Physics of Ionized Gases 1976, ed. by B. Navinšek (Institute of Physics, Ljubljana 1976) p. 493Google Scholar
  270. 4.268
    C. B. Cooper, R. G. Hart, J. C. Riley: J. Appl. Phys. 44, 5183 (1973)CrossRefGoogle Scholar
  271. 4.269
    D. Onderdelinden: Can. J. Phys. 46, 739 (1968) and Thesis, Amsterdam (1968)Google Scholar
  272. 4.270
    H. H. Andersen, K. N. Tu, J. F. Ziegler: Nucl. Instrum. Methods 149, 247 (1978)CrossRefGoogle Scholar
  273. 4.271
    H. J. Smith, G. van Wyk: Phys. Lett. 64A, 327 (1977)Google Scholar
  274. 4.272
    G. van Wyk, H. J. Smith: Radiat. Eff. 38, 245 (1978)Google Scholar
  275. 4.273
    G. S. Anderson. J. Appl. Phys. 37, 2838 (1966)CrossRefGoogle Scholar
  276. 4.274
    G. S. Anderson: J. Appl. Phys. 38, 1607 (1967)CrossRefGoogle Scholar
  277. 4.275
    J. Farren, W. J. Scaife: AERE-R5717, AERE Harwell Didcot (1968)Google Scholar
  278. 4.276
    J. J. Ph. Elich, H. E. Roosendaal, D. Onderdelinden: Radiat. Eff. 14, 93 (1972)Google Scholar
  279. 4.277
    J. M. Fluit, C. Snoek, J. Kistemaker: Physica 30, 144 (1964)CrossRefGoogle Scholar
  280. 4.278
    R. S. Nelson: Philos. Mag 7, 515 (1962)Google Scholar
  281. 4.279
    E. P. Vaulin, N. E. Georgieva, T. D. Martynenko: Fiz. Tverd. Tela 19, 1423 (l977); Engl. transl.: Sov. Phys.-Solid State 19, 826 (1977)Google Scholar
  282. 4.280
    H. L. Garvin: NASA CR-54678 (1968)Google Scholar
  283. 4.281
    R. C. Krutenat, C. Panzera: J. Appl. Phys. 41, 4953 (1970)CrossRefGoogle Scholar
  284. 4.282
    V. E. Yurasova, U. S. Chernysh, M. U. Kuvakin, L. B. Shelyakin: Zh. Eksp. Teor. Fiz. Pisma Red. 21, 197 (1975); Engl. transl.: JETP Lett. 21, 88 (1975)Google Scholar
  285. 4.283
    U. Littrnark, W. Hofer: J. Mater. Sci. 13, 2577 (1978)CrossRefGoogle Scholar
  286. 4.284
    P. P. Davidse, L. T. Maissel: J. Appl. Phys. 37, 574 (1966)CrossRefGoogle Scholar
  287. 4.285
    P. Blank, K. Wittmaack: J. Appl. Phys. 50, 1519 (1979)CrossRefGoogle Scholar
  288. 4.286
    T. M. Nenadović, Z. B. Fotrić, T. S. Dimitrijević: Surf. Sci. 33, 607 (1972)CrossRefGoogle Scholar
  289. 4.287
    S. N. Cramer, E. M. Oblow: Nucl. Fusion 15, 339 (1975)Google Scholar
  290. 4.288
    J. F. Ziegler, J. J. Cuomo, J. Roth: Appl. Phys. Lett. 30, 268 (1977)CrossRefGoogle Scholar
  291. 4.289
    K. Ohasa, H. Maeda, S. Yamamoto, M. Nagami, H. Ohtsuka, S. Kasai, K. Odajima, H. Kimura, S. Sengoku, Y. Shimomura: J. Nucl. Mater. 76, 489 (1978)CrossRefGoogle Scholar
  292. 4.290
    J. L. Whitton, W. O. Hofer, U. Littmark, M. Braun, B. Emmoth: Appl. Phys. Lett. 36, 531 (1980)CrossRefGoogle Scholar
  293. 4.291
    R. J. Berg, G. J. Kominiak: J. Vac. Sci. Technol. 13, 403 (1976)CrossRefGoogle Scholar
  294. 4.292
    R. S. Gvosdover, V. M. Efremenkova, L. B. Shelyakin, V. E. Yurasova: Radiat. Eff. 27, 237 (1976)Google Scholar
  295. 4.293
    W. Hauffe: Phys. Status Solidi (a) 4, 111 (1971)Google Scholar
  296. 4.294
    J. L. Whitton, G. Carter, M. J. Nobes, J. S. Williams: In Physics of Ionized Gases 1976, Contributed Papers, ed. by B. Navinšek (Institute of Physics, Ljubljana 1976) p. 246Google Scholar
  297. 4.295
    J. L. Whitton, L. Tanović, J. S. Williams: Appl. Surf. Sci. 1, 408 (1978)CrossRefGoogle Scholar
  298. 4.296
    H. H. Andersen: In Physics of Ionized Gases 1974, ed. by V. Vujnović (Institute of Physics, Zagreb 1974) p. 361Google Scholar
  299. 4.297
    H. Fetz, H. Oechsner: In Proc. 6 ieme Int. Conf. PhMomMes d'Ionisations dans les Gaz, Paris (1963) p. 39Google Scholar
  300. 4.298
    N. Laegreid, G. K. Wehner: J. Appl. Phys. 32Z, 365 (1961)CrossRefGoogle Scholar
  301. 4.299
    D. Rosenberg, G. K. Wehner: J. Appl. Phys. 33, 1842 (1962)CrossRefGoogle Scholar
  302. 4.300
    J. A. Borders, R. A. Langley, K. L. Wilson: J. Nucl. Mater. 76, 168 (1978)CrossRefGoogle Scholar
  303. 4.301
    J. Roth, J. Bohdansky, W. Ottenberger: IPP Report 9/26 (1979)Google Scholar
  304. 4.302
    S. Miyagawa, Y. Ato, Y. Morita: J. Appl. Phys. 49, 6164 (1978)CrossRefGoogle Scholar
  305. 4.303
    G. K. Wehner: General Mills Report No. 2309 (l962)Google Scholar
  306. 4.304
    J. Roth, J. Bohdansky, W. Poschenrieder, M. K. Sinha: J. Nucl. Mater. 63, 222 (1976)Google Scholar
  307. 4.305
    J. Bohdansky, H. L. Bay, W. Ottenberger: J. Nucl. Mater. 76, 163 (1978)CrossRefGoogle Scholar
  308. 4.306
    J. Bohdansky, J. Roth, M. K. Sinha: In Proc. 9th Symp. on Fusion Technology (Pergamon, London 1976) p. 541Google Scholar
  309. 4.307
    T. P. Martynenko: Fiz. Tverd. Tela 9, 2839 (1967); Engl. transl.: Sov. Phys.-Solid State 9, 2232 (l968)Google Scholar
  310. 4.308
    G. K. Wehner: Phys. Rev. 108, 35 (1957)CrossRefGoogle Scholar
  311. 4.309
    H. Ismail, A. Septier: In Proc. 3rd Int. Symp. on Discharges and Electrical Insulation in Vacuum (1968) p. 95Google Scholar
  312. 4.310
    G. Holmén, O. Almén: Ark. Fys. 40, 429 (1970)Google Scholar
  313. 4.311
    K. H. Krebs: In Atomic and Molecular Data for Fusion (IAEA, Wien 1977) p. 185Google Scholar
  314. 4.312
    H. J. Smith: Phys. Lett. 37A, 289 (1971)Google Scholar
  315. 4.313
    O. C. Yonts: In Proc. Nuclear Fusion Reactor Conference (British Nuclear Energy Society, Culham 1969) p. 424Google Scholar
  316. 4.314
    C. Fert, N. Colombie, B.Fagot, Pham van Chuong: In Le Bombardement Ionique (CNRS, Paris 1961) p. 67Google Scholar
  317. 4.315
    O. C. Yonts, C. E. Normand, D. E. Harrison: J. Appl. Phys. 31, 447 (1960)CrossRefGoogle Scholar
  318. 4.316
    C. E. Carlston, G. D. Magnuson, A. Comeaux, P. Mahavedan: Phys. Rev. 138, 759 (1965)CrossRefGoogle Scholar
  319. 4.317
    H. Daley, J. Perel: AIAA J. 5, 113 (1967)Google Scholar
  320. 4.318
    G. K. Wehner: Phys. Rev. 112, 1120 (1958)CrossRefGoogle Scholar
  321. 4.319
    A. Southern, W. R. Willis, M. T. Robinson: J. Appl. Phys. 34, 153 (1963)CrossRefGoogle Scholar
  322. 4.320
    J. Nizam, N. Benazeth-Colombie: Rev. Phys. Appl. 10, 183 (1975)Google Scholar
  323. 4.321
    H. Sommerfeldt, E. S. Mashkova, V. A. Molchanov: Phys. Lett. 38A, 237 (1972)Google Scholar
  324. 4.322
    O. V. Kurbatov: Zh. Tekh. Fiz. 37, 1814 (1967); Engl. trans].: Sov. Phys.-Tech. Phys. 12, 1328 (1968)Google Scholar
  325. 4.323
    H. Oechsner: Dissertation, Wiirzburg (1963)Google Scholar
  326. 4.324
    G. K. Wehner, D. Rosenberg: J. Appl. Phys. 32, 887 (1961)CrossRefGoogle Scholar
  327. 4.325
    H. L. Bay, W. O. Hofer: Unpublished (1977)Google Scholar
  328. 4.326
    N. Laegreid, G. K. Wehner: In Trans. 7th National Vacuum Symp. (1960) p. 286Google Scholar
  329. 4.327
    C. H. Weijsenfeld, A. Hoogendoorn, M. Koedam: Physica 27, 763 (1961)CrossRefGoogle Scholar
  330. 4.329
    E. S. Borovik, N. P. Katrich, G. T. Nikolaev: At. Energ. U.S.S.R. 21, 339 (1966)Google Scholar
  331. 4.329
    W. M. Gusev, M. I. Guseva, Y. L. Krassoklin, S. U. Mirnov, A. V. Nedopassov, U. N. Stepanov Fiz. Khim. Obrab. Mater. 1, 15 (1976)Google Scholar
  332. 4.330
    E. Hintz, D. Rusbiildt, B. Schweer, J. Bohdansky, J. Roth, P. A. Martinelli: J. Nucl. Mater. 93 and 94 (1980)Google Scholar
  333. 4.331
    M. I. Guseva: Radiotekh. Elektron. 7, 1680 (1962); Engl. transl.: Radio Eng. Electron. Phys. (USSR) 7,1563 (1962)Google Scholar
  334. 4.332
    V. K. Koshkin: “Sergev Ordzhonikidze” Aeronauti Institut, Report (1975)Google Scholar
  335. 4.333
    J. K. Hepworth: J. Phys. D3, 1475 (1970)Google Scholar
  336. 4.334
    C. R. Finfgeld: ORO-3557-15, Oak Ridge Operations Offices, Oak Ridgé, Tennessee (1970)Google Scholar
  337. 4.335
    G. Sletten, P. Knudsen: Nucl. Instrum. Methods 102, 459 (1972)CrossRefGoogle Scholar
  338. 4.336
    W. O. Hofer: Private communication (1977)Google Scholar
  339. 4.337
    H. L. Bay, J. Bohdansky, E. Hechtl: Radiat. Eff. 41, 77 (1979)Google Scholar
  340. 4.338
    R. V. Stuart, G. K. Wehner: J. Appl. Phys. 33,2345 (1962)CrossRefGoogle Scholar
  341. 4.339
    E. Hechtl, H. L. Bay, J. Bohdansky: Appl. Phys. 16, 147 (1978)CrossRefGoogle Scholar
  342. 4.340
    Sh. G. Askerov, L. A. Sena: Fiz. Tverd. Tela 11, 1591 (1969); Engl. transl.: Sov. Phys.-Solid State 11, 1288 (1969)Google Scholar
  343. 4.341
    H. M. Windawi, J. R. Katzer, C. B. Cooper: Phys. Lett. 59A, 62 (1976)Google Scholar
  344. 4.342
    P. K. Rol, J. M. Fluit, J. Kistemaker: Physica 26, 1000 (1960)CrossRefGoogle Scholar
  345. 4.343
    G. Dupp, A. Scharmann: Z. Phys. 192, 284 (1966)CrossRefGoogle Scholar
  346. 4.344
    M. I. Guseva: Fiz. Tverd. Tela 1, 1540 (1959); Engl. transl.: Sov. Phys.-Solid State 1, 1410 (1960)Google Scholar
  347. 4.345
    K. B. Cheney, E. T. Pitkin: J. Appl. Phys. 36, 3542 (1965)CrossRefGoogle Scholar
  348. 4.346
    T. P. Martynenko: Fiz. Tverd. Tela 10, 2876 (1968) [Engl. Transl.: Sov. Phys.-Solid State 10, 2274(1969)]Google Scholar
  349. 4.347
    B. M. Gurmin, T. P. Martynenko, Ya. A. Ryzkov: Fiz. Tverd. Tela 10, 411 (1968); Engt. transl.: Sov. Phys.-Solid State 10, 324 (1968)Google Scholar
  350. 4.348
    A. J. Summers, N. J. Freeman, N. R. Daly: J. Appl. Phys. 42, 4774 (1971)CrossRefGoogle Scholar
  351. 4.349
    K. Akaishi: Private communication (1977)Google Scholar
  352. 4.350
    H. Oechsner: Appl. Phys. 8, 185 (1975)CrossRefGoogle Scholar
  353. 4.351
    M. Kaminsky, S. K. Das, P. Dusza, J. Cecchi: in Int. Symp. Fusion Technology ( Euroatom, Padua 1978) p. 112Google Scholar
  354. 4.352
    F. Grønlund, W. J. Moore: J. Chem. Phys. 32,1540 (1960)CrossRefGoogle Scholar
  355. 4.353
    C. D. O'Brian, A. Lindner, W. J. Moore: J. Chem. Phys. 29,3 (1958)CrossRefGoogle Scholar
  356. 4.354
    B. Emmoth, M. Braun, H. P. Palenius: J. Nucl. Mater. 63,482 (1976)Google Scholar
  357. 4.355
    F. M. Devienne, A. Roustan: C. R. Acad. Sci. 268, 1362 (1969)Google Scholar
  358. 4.356
    B. Perović, B. Čobić: In Proc. 5th Int. Conf. Ionization Phenomena in Gases, ed. by H.Maecher (North-Holland, Amsterdam 1962) p. 1155Google Scholar
  359. 4.357
    M. Szymońiski, R. S. Bhattacharya, H. Overeijnder, A. E. deVries: J. Phys. D. 11, 751 (1978) 751 (1978)CrossRefGoogle Scholar
  360. 4.358
    D. A. Thompson, S. S. Johar: Appl. Phys. Lett. 34, 342 (1979)CrossRefGoogle Scholar
  361. 4.359
    C. H. Meyer, Jr., J. N. Smith: GA-A15134, General Atomics Inc., San Diego (1978); J. Vac, Sci. Technol, 16,248 (1979)Google Scholar
  362. 4.360
    H. F. Winters, D. Horne: Phys. Rev. B10, 55 (1974)Google Scholar
  363. 4.361
    H. L. Bay, J, Bohdansky, J. Roth: Unpublished (1977)Google Scholar
  364. 4.362
    U. A. Arifov; A. Kh. Ayukhanov, V. A. Shustrov, R. M. Khasanov, V. I. Poltoratskii: Doklady Akad. Nauk SSSR 155, 306 (1964); Engl. transl.: Sov. Phys. Doklady 9, 214 (1964)Google Scholar
  365. 4.363
    A. K. Furr, C. R. Finfgeld: J. Appl. Phys. 41, 1739 (1970)CrossRefGoogle Scholar
  366. 4.364
    J. S. Colligon, R. W. Bramham: In Atomic Collisions in Solids, ed. by D. W. Palmer, M. W. Thompson, P. D. Townsend (North-Holland, Amsterdam 1970) p. 258Google Scholar
  367. 4.365
    M. T. Robinson, A. L. Southern: J. Appl. Phys. 38, 2969 (1967)CrossRefGoogle Scholar
  368. 4.366
    F. Keywell: Phys. Rev. 97, 1611 (1955)CrossRefGoogle Scholar
  369. 4.367
    J. Bottiger, H. Wolder Jorgensen, K. B. Winterbon: Radiat. Eff. 11, 133 (1971)Google Scholar
  370. 4.368
    K. B. Winterbon: Ion Implantation Range and Energy Deposition Distributions, Vol. 2, Low Incident Ion Energies (Plenum, New York 1975)Google Scholar
  371. 4.369
    D. A. Thompson, S. S. Johar: Nucl. Instrum. Methods 170, 281 (1980)CrossRefGoogle Scholar
  372. 4.370
    U. Littmark, G. Maderlechner: In Physics of Ionized Gases 1976, Contributed Papers, ed. by B. Navinšek (Institute of Physics, Ljubljana 1976) p. 139Google Scholar
  373. 4.371
    J.Lindhard, M. Scharff, H. E. Schiøtt: K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 33, No, 14(1963)Google Scholar
  374. 4.372
    E. Hotston: Nucl. Fusion 15, 544 (1975)Google Scholar
  375. 4.373
    E. Hechtl: Nucl. Instrum. Methods 139, 79 (1976)CrossRefGoogle Scholar
  376. 4.374
    J. Bohdansky, J. Roth, H. L. Bay: J. Appl. Phys. 51, 2861 (1980)CrossRefGoogle Scholar
  377. 4.375
    C. J. Smithells (ed.): Metals Reference Book (Butterworths, London 1975)Google Scholar
  378. 4.376
    D. P. Stull, H. Prophet (eds.):JANAF Thermochemical Tables, 2nd ed., NSRDS-NBS No. 37, National Bureau of Standards, Washington, D.C. (1971)Google Scholar
  379. 4.377
    D. E. Harrison, G. D. Magnuson: Phys. Rev. 122, 1421 (1961)CrossRefGoogle Scholar
  380. 4.378
    R. Behrisch, G. Maderlecher, B. M. U. Scherzer, M. T. Robinson: Appl. Phys. 18, 391 (1979)CrossRefGoogle Scholar
  381. 4.379
    L. G. Haggmark, W. D. Wilson: J. Nucl. Mater. 76,149 (1978)CrossRefGoogle Scholar
  382. 4.380
    G. K. Wehner: J. Appl. Phys. 25, 270 (1954)CrossRefGoogle Scholar
  383. 4.381
    G. K. Wehner: J. Appl. Phys. 30, 1762 (1959)CrossRefGoogle Scholar
  384. 4.382
    V. A. Molchanov, V. G. Telkovskii: Dokl. Akad. Nauk SSSR 136, 801 (1961); Engl. transl. Sov. Phys.-Doklady 6, 137 (1961)Google Scholar
  385. 4.383
    I. I. Dushikov, V. A. Molchanov, V. G. Tel'kovskii, V. M. Chicherov: Zh. Tekh. Fiz. 31, 1012 (1961); Engl. transl.: Sov. Phys,-Tech. Phys. 6, 735 (1962)Google Scholar
  386. 4.384
    E. S. Mashkova, V. A. Molchanov: Zh. Tekh. Fiz. 9, 2081 (1964); Engl. transl.: Sov. Phys.Tech. Phys. 9, 1601 (1965)Google Scholar
  387. 4.385
    D. T. Goldman, A. Simon: Phys. Rev. 111, 383 (1958)CrossRefGoogle Scholar
  388. 4.386
    R. S. Pease: In Proc. 13th Course Int. Summer School “Enrico Fermi” (Academic, London 1959) p. 157Google Scholar
  389. 4.387
    G. Dupp, A. Scharmann: Z. Phys. 194, 448 (1966)CrossRefGoogle Scholar
  390. 4.388
    C. E. Ramer, M. A. Narasinham, H. K. Reynolds, J. C. Alldred: J. Appl. Phys. 36, 1673 (1964)CrossRefGoogle Scholar
  391. 4.389
    I. N. Evdokimov, V. A. Molchanov: Fiz. Tverd. Tela 9, 2503 (1967); Engl. trans].: Sov. Phys.Solid State 9, 1967 (1968)Google Scholar
  392. 4.390
    I. N. Evdokimov, V. A. Molchanov: Can. J. Phys. 46, 779 (1968)Google Scholar
  393. 4.391
    H. L. Bay, J. Bohdansky: Appl. Phys. 19, 421 (1979)CrossRefGoogle Scholar
  394. 4.392
    T. Hoffmann, H. L. Dodds, M. T. Robinson, D. K. Holmes: Nucl. Sci. Eng. 68, 204 (1978)Google Scholar
  395. 4.393
    A. D. Marwick: Nucl. Instrum. Methods 132, 313 (1976)CrossRefGoogle Scholar
  396. 4.394
    K. T. Rie: Jül-304-RW Kernforschungsanlage Jülich (1965)Google Scholar
  397. 4.395
    M. W. Thompson: Philos. Mag. 4,139 (1959)Google Scholar
  398. 4.396
    G. Ayrault, R. S. Averback, D. N. Seidman: Ser. Metall 12, 119 (1978)CrossRefGoogle Scholar
  399. 4.397
    G. Ayrault, D. N. Seidman: Preprint No. 2944. Materials Science Center, Cornell University (1978)Google Scholar
  400. 4.398
    J. P. Biersack, W. Kaczerowski, J. Ney, B. K. H. Rahim, A. Riccato, G. R. Thacker, H. Uecker J. Nucl. Mater. 76, 77, 640 (1978)CrossRefGoogle Scholar
  401. 4.399
    J. P. Biersack, E. Santner, R. Neubert, J. Ney: J. Nucl. Mater 63, 443 (1976)Google Scholar
  402. 4.400
    H. H. Andersen: J. Nucl. Mater. 76, 190 (1978)CrossRefGoogle Scholar
  403. 4.401
    P. Sigmund: Can. J. Phys. 46, 731 (1968)Google Scholar
  404. 4.402
    J. Schou, H. Sørensen, U. Littmark: J. Nucl. Mater. 76, 359 (1978)CrossRefGoogle Scholar
  405. 4.403
    H. H. Andersen, T. Lenskjær, G. Sidenius, H. Sorensen: J. Appl. Phys. 47, 13 (1976)CrossRefGoogle Scholar
  406. 4.404
    H. Sørensen: In Proc. Int. Symp. on Plasma Wall Interactions (Pergamon, London 1977) p. 437Google Scholar
  407. 4.405
    O. Almén, G. Bruce: Conf on the Physics of Electromagnetic Separation Methods, Orsay (1962) (unpublished)Google Scholar
  408. 4.406
    H. H. Andersen: Radiat. Eff. 3, 51 (1970)Google Scholar
  409. 4.407
    H. H. Andersen: Radiat. Eff. 7, 179 (1971)Google Scholar
  410. 4.408
    D. Hildebrandt, R. Manns: Phys. Status Solidi (a) 38, K155 (1976)Google Scholar
  411. 4.409
    D. Hildebrandt, R. Manns: Radiat. Eff. 31, 153 (1977)Google Scholar
  412. 4.410
    H. Düsterhöft, R. Manns, D. Hildebrandt: Phys. Status Solidi (a)36, K93 (1976)Google Scholar
  413. 4.411
    D. Hildebrandt, R. Manns, R. Rogaschewski: Radiat. Eff. 33, 251 (1977)Google Scholar

Copyright information

© Springer-Verlag 1981

Authors and Affiliations

  • Hans Henrik Andersen
  • Helge L. Bay

There are no affiliations available

Personalised recommendations