Advances in Solid State Physics pp 275-286

Part of the Advances in Solid State Physics Volume 41 book series (ASSP, volume 41)

X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

  • David Rafaja


An overview of X-ray scattering methods used for analysis of the real structure of thin films is presented that includes conventional diffraction, glancing angle X-ray diffraction, X-ray reflectivity measurement and grazing incidence X-ray diffraction. The capability of the above techniques is illustrated on two typical examples: investigation of real structure of polycrystalline thin films and study of interface morphology and atomic ordering in periodic multilayers.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2001

Authors and Affiliations

  • David Rafaja
    • 1
  1. 1.Department of Electronic Structures, Faculty of Mathematics and PhysicsCharles UniversityPragueCzech Republic

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