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Diffusion in Semiconductors

  • Teh Yu Tan
  • Ulrich Gösele

Keywords

Point Defect Gallium Arsenide GaAs Crystal Doping Dependence Native Point Defect 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • Teh Yu Tan
    • 1
  • Ulrich Gösele
    • 2
  1. 1.Department of Mechanical Engineering & Materials ScienceDuke UniversityHudson Hall DurhamUSA
  2. 2.Max-Planck-Institut für MikrostrukturphysikHalleGermany

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