Growth of Oxides with Complex Stoichiometry by the ALD Technique, Exemplified by Growth of La1–xCaxMnO3

  • Ola Nilsen
  • Martin Lie
  • Helmer F. Fjellvåg
  • Arne Kjekshus
Chapter
First Online:
Part of the Topics in Applied Physics book series (TAP, volume 106)

Abstract

To grow films with a complex stoichiometry by the ALD approach has long been regarded as a complicated task and hitherto not pursued to a large extent. This review will cover some of the milestones on the way to controlled deposition of compounds with intricate stoichiometry with the ALD technique. The survey shows that some of the foreseen obstacles might not necessarily be that severe. The growth of films of La1–x Ca x MnO3 will be used as a model to describe the process for growth of oxides with complex composition, and a mathematical model to predict the deposited stoichiometry is advanced. It is shown that the ALD window found for deposition of MnO2 is extended to higher temperatures when Ca and/or La is present on the film surface.

Keywords

71.55.-i; 72.80.Sk; 73.20.At; 75.47.Lx; 77.55.+f 
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Authors and Affiliations

  • Ola Nilsen
    • 1
  • Martin Lie
    • 1
  • Helmer F. Fjellvåg
    • 1
  • Arne Kjekshus
    • 1
  1. 1.Department of ChemistryUniversity of OsloOsloNorway

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