Innovative Superhard Materials and Sustainable Coatings for Advanced Manufacturing pp 419-428 | Cite as
Comparative Study of Near Stochiometric a-SiC:H and a-SiC Films: Effect of the Bonded Hydrogen
Abstract
Amorphous silicon carbon films having near stochiometric composition had been deposited by (i) reactive magnetron sputtering of silicon target in argon-methane gas mixture (a-SiC:H films) and (ii) ion-plasma deposition using polycrystalline silicon carbide as a vacuum arc source (a-SiC films).
Main research objective was focused on peculiarities of the short order structure and electronic properties of a-SiC:H and a-SiC films. It was shown that a-SiC film is more dense and hard in comparison with a- SiC:H. The a-SiC:H films are soft, nanoporous and show visible room temperature photoluminescence. Efficiency of photoluminescence of a- SiC:H can be increased by one order of magnitude by low temperature treatment. It was shown that carbon-hydrogen bonds in Si-C-H structural form play an important role in light absorption and emitting process.
Keywords
Superhard Material Sustainable Coating Relative Sensitivity Factor Silicon Target Polycrystalline Silicon CarbidePreview
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