Multicomponent Nanostructured Thin Films. Deposition, Characterization, Testing and Application
The current topics related to the deposition, characterization, testing and application of tribological coatings are reviewed and refer to our recent results on nanostructured (Ti,Cr)-(Al,Si,Zr,Ca)-(C,B,N,O) thin films. The PVD targets based on the systems TiN+TiB2, TiB2+TiC, Ti5Si3+Ti, Ti5Si3+TiN, TiB2+Ti5Si3+Si, TiB2+Si, Ti5Si3+TiC, TiAl+TiC, TiB+Ti9Cr4B+Cr2Ti, CrB2, TiB2+TiAl+Ti2AlN, TiC+Ti3SiC2+TiSi2, TiC0.5+ZrO2, TiC0.5+CaO, Ti5Si3+ZrO2 were manufactured by means of self-propagating high-temperature synthesis (SHS). The BN and WSex films were deposited using a sintered hexagonal BN and a cold pressed WSe2 target, respectively. Multicomponent films were deposited by DC magnetron sputtering of composite targets either in an atmosphere of argon or reactively in a gaseous mixture of argon and nitrogen. The WSe2 films were deposited by PLD and ion-assisted PLD techniques. The microstructure and chemical composition of the films were studied by means of Auger electron spectroscopy (AES), energy-dispersive X-ray spectroscopy (EDXS), X-ray diffraction (XRD), scanning and transmission electron microscopy (SEM and TEM), high-resolution (HR) TEM, X-ray photoelectron spectroscopy (XPS), and electron energy-loss spectroscopy (EELS). The films were also characterized in terms of their hardness, elastic modulus, elastic recovery, adhesion, surface topography, friction and wear. Particular attention was paid to the analysis of the structure of the films in the nanometric scale and the evaluation of the properties of the individual nanostructures. Three groups of films are considered: 1) nanostructured hard, tribological coatings for civilian engineering Ti-B-N, Ti-Cr-B-N, Ti-Si-N, Ti-Al-B-N, Ti-Si-C-N, Ti-Si-B-N, BN and Cr-B-N; 2) double-layer self-lubricating coatings for civilian air force and space industry WSex/TiC, WSex/TiCN, WSex/TiSiN and 3) biocompatible coatings for medicine Ti-Ca-C-N-O, Ti-Zr-C-N-O, and Ti-Zr-Si-O-N.
Keywordsmagnetron sputtering nanostructure thin film surface fracture structure phase composition surface topography orientation relationships physical properties mechanical properties
Unable to display preview. Download preview PDF.
- 2.D.V. Shtansky, Y. Ikuhara, Y. Yamada-Takamura, T. Yoshida, Sci. Technol. Adv. Mater., 1/4 (2001) 219.Google Scholar
- 8.A. Gupper, A. Fernandez, C. Fernandez-Ramos, F. Hofer, C. Mitterer, P. Warbichler, Monatshefte für Chemie 133 (2002) 837.Google Scholar
- 16.R.A. Andrievski, G.V. Kalinnikov, D.V. Shtansky, Features of Fracture Surface and Grain Boundary Structure of Boride/Nitride Materials, Nanophase and Nanocomposite Materials III, Mat. Res. Soc. Symp. Proc., S. Komarneni, Y. Parker and H. Hahn (Eds.), 581 (2000) 583.Google Scholar
- 19.D.V. Shtansky, I.V. Lyasotsky, N.B. D’yakonova, F.V. Kiryukhantsev-Korneev, S.A. Kulinich, E.A. Levashov, J.J. Moore, Surf. Coat. Technol., 2003, (in press).Google Scholar
- 21.E.A. Levashov, A.S. Rogachev, V.I. Yukhvid, I.P. Borovinskaya, Binom, Moscow, 1999, pp. 134 (in Russian).Google Scholar
- 24.D.V. Shtansky, F.V. Kiryukhantsev-Korneev, A.N. Sheveiko, M.I. Petrzhik, I.A. Bashkova, O.V. Malochkin, E.A. Levashov, I.V. Lyasotski, Phys. Solid State (2004) (to be published).Google Scholar
- 25.D.V. Shtansky, T.A. Lobova, V.Yu. Fominski, S.A. Kulinich, I.V. Lyasotsky, M.I. Petrzhik, E.A. Levashov, J.J. Moore, Surf. and Coat. Technol, 2003 (in press).Google Scholar
- 26.D.V. Shtansky, E.A. Levashov, N.A. Glushankova, N.B. D’yakonova, S.A. Kulinich, M.I. Petrzhik, F.V. Kiryukhantsev-Korneev, F. Rossi, Surf. and Coat. Technol, 2003 (in press).Google Scholar