Theory and Design of Micromechanical Vibratory Gyroscopes
Fabrication technologies for microcomponents, microsensors, micromachines and microelectromechanical systems (MEMS) are being rapidly developed, and represent a major research effort worldwide. There are many techniques currently being utilised in production of different types of MEMS, including inertial microsensors, which have made it possible to fabricate MEMS in high volumes at low individual cost. Micromechanical vibratory gyroscopes or angular rate sensors have a large potential for different types of applications as primary information sensors for guidance, control and navigation systems. They represent an important inertial technology because other gyroscopes such as solid-state gyroscopes, laser ring gyroscopes and fibre optic gyroscopes, do not allow for significant miniaturisation. MEMS sensors are commonly accepted as low performance and low cost sensors. Nevertheless, recent applications have resulted in the need for sensors with improved performances. High performances could be achieved by means of improved sensitive element and circuit design.
KeywordsMotion Equation Sensitive Element Angular Rate Proof Mass Comb Drive
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