Electron Kinetics and Applications of Glow Discharges pp 349-366

Part of the NATO Science Series: B book series (NSSB, volume 367) | Cite as

Fluid, Kinetic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas

  • Ming Li
  • Hiroyuki Date
  • David B. Graves

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Copyright information

© Kluwer Academic Publishers 2002

Authors and Affiliations

  • Ming Li
    • 1
  • Hiroyuki Date
    • 1
    • 2
  • David B. Graves
    • 1
  1. 1.Department of Chemical EngineeringUniversity of CaliforniaBerkeleyUSA
  2. 2.College of Medical TechnologyHokkaido UniversitySapporoJapan

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