Abstract
Large-area electronics is mainly concerned with the development of input/output devices such as xerographic drums, page-width image sensors, and addressing circuits for LCD panels and printer heads. The introduction of amorphous hydrogenated silicon (a-Si:H) as a large-area thin-film semiconductor with low-cost fabrication capability has given a new impetus to this field. While the excellent photoconductivity of a-Si:H was initially exploited (solar cells, xerography), the development of thin-film transistors and their application for addressing circuits has now assumed the key role. Examples of 22.8 cm large electronic devices are shown and their technological and design implications discussed.
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References
D. E. Carlson, in: Semiconductor and Semimetals, Vol. 21, Part D, ed. by J. I. Pankove, 1984, p. 7
W. G. Hawkins, D. J. Drake, N. B. Goodman, and P. J. Hartmann, Mat. Res. Soc. Symp. Proc. Vol. 33, 231 (1984)
W. G. Hawkins, Mat. Res. Soc. Symp. Vol. 49, 443 (1985)
Hydrogenated Amorphous Silicon, Part A-D, ed. by J. I. Pankove, in: Semiconductors and Semimetals, Vol. 21, ed. by R. K. Willardson and A. C. Beer (cademic Press, New York, London 1984)
H. C. Tuan, Mat. Res. Soc. Symp. Proc. Vol. 33, 247 (1984)
M. J. Thompson, J. Vac. Sci. Technol. B2, 827 (1984)
M. J. Thompson, Mat. Res. Soc. Symp. Vol. Proc. 70, 613 (1986)
D. Adler, in [4], p. 291
J. C. Phillips, J. Non-Crystalline Solids 34, 153 (1979)
W. E. Spear and P. G. LeComber, J. Non-Crystalline Solids 8–10, 727 (1972)
M. Vanecek, A. Abraham, O. Stika, J. Stuchlik, and J. Kocka, phys. stat. sol. (a) 83, 617 (1984)
M. Hirose in [4], p. 9
Y. Nakayama, T. Natsuhara, N. Nagasawa, and T. Kawamura, Jpn. J. Appl. Phys. 21, L 604 (1982)
W. E. Spear, and P. G. LeComber, Solid State Comm. 17, 1193 (1975)
K. D. Mackenzie, A. J. Snell, I. French, P. G. LeComber, and W. E. Spear, Appl. Phys. A 31, 87 (1983)
G. Myburg, and R. Swanepoel, J. Non-Crystalline Solids 89, 13 (1987)
J. Tauc, in: Amorphous and Liquid Semiconductors, ed. by J. Tauc (Plenum Press, 1974), p. 175
W. E. Spear, H. L. Steemers, and H. Mannsperger, Phil. Mag. B 48, L 49 (1983)
J. M. Marshall, R. A. Street, and M. J. Thompson, Phys. Rev. B 29, 2331 (1984)
R. A. Street, J. Zesch, and M. J. Thompson, Appl. Phys. Lett. 43, 672 (1983)
E. S. Sabisky, J. Non-Crystalline Solids 87, 43 (1986)
J. Mort, J. Vac. Sci. Technol. B 2, 823 (1984)
Y. Nakayama, A. Sugimura, M. Nakano, and T. Kawamura, Photogr. Sci. Eng. 26, 188 (1982)
T. Hamano, H. Ito, T. Nakamura, T. Ozawa, M. Fuse, and M. Takenouchi, Jpn. J. Appl. Phys. 21, Suppl. 21-1, 245 (1982)
S. Kaneko, Y. Kajiwara, F. Okumura, and T. Ohkubo, Mat. Res. Soc. Symp. Proc. Vol. 49, 423 (1985)
K. Kempter, Amorphous Semiconductors for Microelectronics, ed. by D. Adler, Proc. SPIE 617, 120 (1986)
M. Hoheisel, H. Wieczorek, and K. Kempter, J. Non-Crystalline Solids 77 & 78, 1413 (1985)
T. Tsukada, K. Seki, Y. Tanaka, H. Yamamoto, and A. Sasano, J. Non-Crystalline Solids 77 & 78, 1027 (1985)
N. Brutscher, to be published
E. Holzenkämpfer, K. Rosan, R. Primig, and K. Kempter, Poly-micro-crystalline and amorphous semiconductor Proc. MRS Meeting 1984, Strasbourg, p. 575
P. G. LeComber, and W. E. Spear in [4], p. 89
R. A. Street, and M. J. Thompson, Appl. Phys. Lett. 45, 769 (1984)
R. A. Street, J. Non-Crystalline Solids 77 & 78, 1 (1985)
O. Sugiura, and M. Matsumura, J. Electron. Commun. (Denshi-Tushin Gakkai shi) J 65-C, 914 (1982) (in japanese)
R. A. Street, and C. C. Tsai, Appl. Phys. Lett. 48, 1672 (1986)
Y. Kaneko, A. Sasano, T. Tsukada, R. Oritsuki, and K. Suzuki, Extd. Abstracts 18th' Int. Conference Sol. St. Devices and Material, Tokyo, 1986, p. 699
Z. Yaniv, V. Canella, Y. Baron, A. Lien, and J. McGill, Mat. Res. Soc. Symp. Proc. Vol. 70, 625 (1986)
D. G. Ast in [4], p. 115
M. Yamano, and H. Takesada, J. Non-Crystalline Solids 77 & 78, 1383 (1985)
M. Takeda, S. Ogo, T. Tamura, H. Kamiura, H. Noda, T. Kawaguchi, I. Yamashita, D. Ando, and H. Kuroda, Proc. 6th Int. Display Res. Conference (Japan Display '86), Tokyo 1986, p. 204
C. van Berkel, and M. J. Powell, J. Non-Crystalline Solids 77 & 78, 1393 (1985)
A. J. Snell, A. Doghmane, P. G. LeComber, and W. E. Spear, Appl. Phys. A 34, 175 (1984)
F. Okumura, and S. Kaneko, Mat. Res. Soc. Symp. Proc. Vol. 33, 275 (1984)
H. Ito, Y. Nishihara, M. Nobue, M. Fuse, T. Nakamura, T. Ozawa, S. Tomiyama, R. Weisfield, H. Tuan, and M. Thompson, Int. Electron. Device Meeting, Washington 1985 (Techn. Digest), p. 436
H. C. Tuan, Mat. Res., Soc. Symp. Proc. Vol. 70, 651 (1986)
T. Tsukude, S. Akamatsu, M. Hirose, M. Ueda, and Y. Osaka, J. Non-Crystalline Solids 77 & 78, 1389 (1985)
Y. Uchida, Y. Watanabe, M. Takabatake, and M. Matsumura, Jpn. J. Appl. Phys. 25, L 798 (1986)
S. Kishida, Y. Naruke, Y. Uchida, and M. Matsumura, J. Non-Crystalline Solids 59 & 60, 1281 (1983)
H. Murrmann, and D. Kranzer, Siemens Forsch. und Entwickl. Ber. 9, 38 (1980)
A. I. Lakatos, Int. Electron. Device Meeting, Washington 1985 (Techn. Digest), p. 428
K. Rosan, and G. Brunst, Mat. Res. Soc. Symp. Proc. Vol. 70, 683 (1986)
T. Leroux, Solid-State Electronics 29, 47 (1986)
M. Shur, C. Hyun, and M. Hack, J. Appl. Phys. 59, 2488 (1986)
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© 1987 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH
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Kempter, K. (1987). Large-area electronics based on amorphous silicon. In: Grosse, P. (eds) Festkörperprobleme 27. Advances in Solid State Physics, vol 27. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0107926
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DOI: https://doi.org/10.1007/BFb0107926
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