Abstract
This chapter is a guidance of Part III that describes the studies of materials, processes and devices related to oxide materials with solution process. Emphasis is placed on the design and synthesis of a precursor solution (or gel) which determines the properties of a final solid, all processes hereafter and gives novel characteristics to the material. There is a possibility for solution process to create a new material which has never been achieved by the conventional gas and solid-based process. Two examples are introduced. In the final parts, the outline of oxide device fabrication using solution process is guided.
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Shimoda, T. (2019). Guide to Oxide-Based Materials. In: Nanoliquid Processes for Electronic Devices. Springer, Singapore. https://doi.org/10.1007/978-981-13-2953-1_11
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DOI: https://doi.org/10.1007/978-981-13-2953-1_11
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Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-2952-4
Online ISBN: 978-981-13-2953-1
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