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Impact Collision Ion Scattering Spectroscopy

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Compendium of Surface and Interface Analysis

Abstract

Ion scattering spectroscopy (ISS) (Smith in J Appl Phys 38:340–347, 1967 [1]) is a real-space method that enables simultaneous analysis of the composition and structure of solid surfaces by utilizing elastic scattering of ions at the surfaces.

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References

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Authors and Affiliations

  1. International Center for Material Nanoarchitectonics (MANA), National Institute for Materials Science, Tsukuba, Japan

    Masakazu Aono

  2. Graduate School of Engineering, Osaka University, Suita, Osaka, Japan

    Mitsuhiro Katayama

Authors
  1. Masakazu Aono
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  2. Mitsuhiro Katayama
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Correspondence to Masakazu Aono .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Aono, M., Katayama, M. (2018). Impact Collision Ion Scattering Spectroscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_45

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