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Compendium of Surface and Interface Analysis pp 259–262Cite as

High-Resolution Rutherford Backscattering Spectrometry

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Abstract

High-resolution Rutherford backscattering spectrometry (HRBS) is an advanced type of Rutherford backscattering spectrometry (RBS), depth resolution of which is improved to sub-nm.

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References

  1. Kimura, K., Mannami, M.: RBS with monolayer resolution. Nucl. Instr. Meth. B 113, 270–274 (1996)

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  2. Nakajima, K., Joumori, S., Suzuki, M., Kimura, K., Osipowicz, T., Tok, K.L., Zheng, J.Z., See, A., Zhang, B.C.: Characterization of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy. Appl. Surf. Sci. 237, 416–420 (2004)

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Micro Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

    Kaoru Nakajima

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  1. Kaoru Nakajima
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Correspondence to Kaoru Nakajima .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Nakajima, K. (2018). High-Resolution Rutherford Backscattering Spectrometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_42

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