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Compendium of Surface and Interface Analysis pp 725–731Cite as

Time-of-Flight Secondary Ion Mass Spectrometry

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Abstract

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is one of the most powerful surface analysis methods in terms of high sensitivity, high spatial resolution imaging, and detailed chemical information.

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Change history

  • 13 April 2019

    In Chapter “Challenges of Real-Scale Production with Smart Dynamic Casting”, low-resolution Figure 4 is replaced with high resolution, Figure 5 is replaced with new figure and Figure 6 and the graph near are positioned as per the standard.

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Authors and Affiliations

  1. Department of Materials and Life Science, Seikei University, Tokyo, Japan

    Satoka Aoyagi

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  1. Satoka Aoyagi
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Correspondence to Satoka Aoyagi .

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  1. Tokyo, Japan

    The Surface Science Society of Japan

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Aoyagi, S. (2018). Time-of-Flight Secondary Ion Mass Spectrometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_117

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