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Historical Overview on the Fundamentals of Sputtering

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Book cover Materials Modification by High-fluence Ion Beams

Part of the book series: NATO ASI Series ((NSSE,volume 155))

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Abstract

Since the first appearence of the word “spluttering” (the original word used by Sir J.J. Thomson) in the scientific literature [1], many papers have been published on the subject and the widespread applications of the techniques and concepts involved in sputtering studies are now of everyday use. The uses extend to fields far away from that in which sputtering phenomena were first studied and developed (e.g. I found an application of sputtering to blood cells, to remove surface layers from red blood cells! [2]).

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Author information

Authors and Affiliations

  1. Dipartimento di Fisica, Università della Calabria, I-87036, Rende, CS, Italy

    A. Oliva

  2. Unità GNSM - CISM di Cosenza, Italy

    A. Oliva

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  1. A. Oliva
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Editors and Affiliations

  1. IBM T.J. Watson Research Center, Yorktown Heights, NY, USA

    Roger Kelly

  2. Laboratório Nacional de Engenharia e Tecnologia Industrial, Sacavem, Portugal

    M. Fernanda da Silva

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© 1989 Kluwer Academic Publishers

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Oliva, A. (1989). Historical Overview on the Fundamentals of Sputtering. In: Kelly, R., da Silva, M.F. (eds) Materials Modification by High-fluence Ion Beams. NATO ASI Series, vol 155. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1267-0_2

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  • DOI: https://doi.org/10.1007/978-94-009-1267-0_2

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