Abstract
A polished, monocrystalline silicon wafer is the starting material for solid state devices produced by silicon planar processing. In this chapter we consider four main topics concerning these wafers: (1) Why are they monocrystalline? (2) What are their crystalline properties? (3) How is their electrical resistivity related to doping? (4) How are wafers prepared from the raw source material of sand? In the next section we consider the crystal structure of silicon, the properties of its principal planes, and the reasons why certain of the planes are chosen for wafer faces.
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© 1990 Van Nostrand Reinhold
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Anner, G.E. (1990). Wafers. In: Planar Processing Primer. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-0441-5_2
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DOI: https://doi.org/10.1007/978-94-009-0441-5_2
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6682-2
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