Abstract
Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro-Opto-Electro- Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed micro-assembly station. The flexibility of the micro-assembly station provides the possibility to manipulate a variety of micro-components. The RFS-MOB design enables to reduce adhesion forces effects during releasing operations. Experimental results are shown and validate the effectiveness of the micro-assembly station and micro-assembly strategies.
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Rabenorosoa, K., Bargiel, S., Clécy, C., Lutz, P., Gorecki, C. (2010). Assembly of 3D Reconfigurable Hybrid MOEMS through Microrobotic Approach. In: Lee, S., Suárez, R., Choi, BW. (eds) Frontiers of Assembly and Manufacturing. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-14116-4_9
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DOI: https://doi.org/10.1007/978-3-642-14116-4_9
Publisher Name: Springer, Berlin, Heidelberg
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