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Ultrafast Laser Micro- and Nanostructuring

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Laser Precision Microfabrication

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 135))

Abstract

Near-threshold non-linear nanoscale processing phenomena generated by sub-100fs laser pulses are reviewed. Coupled with high NA focusing optics, high power oscillators demonstrated a high-repetition rate approach for the precise laser machining of dielectrics on a submicrometer scale. A new field of nanostructuring proposed on the basis of apertureless scanning near-field optical nanomachining and examples of femtosecond nanosurgery are discussed.

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Abbreviations

a:

Absorbed fraction of incident laser light

α:

Absorptivity

d0 :

Beam diameter

w0 :

Beam radius

ρ:

Density

Γ:

Electron–phonon coupling constant

τe–p :

Electron–phonon relaxation time

δ:

Film thickness

F:

Fluence

Ce;l :

Heat capacity (electron, lattice)

ke;l :

Heat conductivity (electron, lattice)

β(I):

Impact ionisation rate

ξ:

Incubation factor

I:

Intensity

Q:

Laser source term

d0 :

Mean distance between two defects

N:

Number of applied pulses

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Authors and Affiliations

  1. Department of Physical Chemistry, University of Vienna, Währinger Strasse 42, A-H1090, Vienna, Austria

    Wolfgang Kautek & Magdalena Forster

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  1. Wolfgang Kautek
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  2. Magdalena Forster
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Correspondence to Wolfgang Kautek .

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  1. Inst. of Phys.a.Chemical Res., Laser Technology Laboratory, RIKEN, Hirozawa 2-1, Wako-shi, Saitama, 351-0198, Japan

    Koji Sugioka

  2. Department of Engineering Physics, Laser Processing Laboratory, École Polytechnique Montréal, Montreal, Canada

    Michel Meunier

  3. Naval Research Laboratory, Overlook Ave. SW., 4555, Washington, 20375, USA

    Alberto Piqué

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Kautek, W., Forster, M. (2010). Ultrafast Laser Micro- and Nanostructuring. In: Sugioka, K., Meunier, M., Piqué, A. (eds) Laser Precision Microfabrication. Springer Series in Materials Science, vol 135. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10523-4_8

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