Abstract
Soft-lithographic techniques that use rubber stamps and molds provide simple means to generate patterns with lateral dimensions that can be much smaller than 1 μm and can even extend into the single nanometer regime. These methods rely on the use of soft elastomeric elements typically made out of the polymer poly(dimethylsiloxane). The first section of this chapter presents the fabrication techniques for these elements together with data and experiments that provide insights into the fundamental resolution limits. Next, several representative soft-lithography techniques based on the use of these elements are presented: (i) microcontact printing, which uses molecular inks that form self-assembled monolayers, (ii) near- and proximity-field photolithography for producing two- and three-dimensional structures with subwavelength resolution features, and (iii) nanotransfer printing, where soft or hard stamps print single or multiple layers of solid inks with feature sizes down to 100 nm. The chapter concludes with descriptions of some device-level applications that highlight the patterning capabilities and potential commercial uses of these techniques.
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Abbreviations
- µCP:
-
microcontact printing
- CMOS:
-
complementary metal–oxide–semiconductor
- DBR:
-
distributed Bragg reflector
- DFB:
-
distributed feedback
- HDT:
-
hexadecanethiol
- ITO:
-
indium tin oxide
- MIM:
-
metal–insulator–metal
- MPTMS:
-
mercaptopropyltrimethoxysilane
- PDMS:
-
polydimethylsiloxane
- PECVD:
-
plasma-enhanced chemical vapor deposition
- PET:
-
poly(ethyleneterephthalate)
- SAM:
-
scanning acoustic microscopy
- SAM:
-
self-assembled monolayer
- SEM:
-
scanning electron microscope
- SEM:
-
scanning electron microscopy
- SWNT:
-
single wall nanotube
- SWNT:
-
single-wall nanotube
- nTP:
-
nanotransfer printing
References
C.A. Mirkin, J.A. Rogers: Emerging methods for micro- and nanofabrication, MRS Bulletin 26, 506–507 (2001)
H.I. Smith, H.G. Craighead: Nanofabrication, Phys. Today 43, 24–43 (1990)
W.M. Moreau (Ed.): Semiconductor Lithography: Principles and Materials (Plenum, New York 1988)
S. Matsui, Y. Ochiai: Focused ion beam applications to solid state devices, Nanotechnology 7, 247–258 (1996)
J.M. Gibson: Reading and writing with electron beams, Phys. Today 50, 56–61 (1997)
L.L. Sohn, R.L. Willett: Fabrication of nanostructures using atomic-force microscope-based lithography, Appl. Phys. Lett. 67, 1552–1554 (1995)
E. Betzig, K. Trautman: Near-field optics – Microscopy, spectroscopy, and surface modification beyond the diffraction limit, Science 257, 189–195 (1992)
A.J. Bard, G. Denault, C. Lee, D. Mandler, D.O. Wipf: Scanning electrochemical microscopy: A new technique for the characterization and modification of surfaces, Acc. Chem. Res. 23, 357 (1990)
J.A. Stroscio, D.M. Eigler: Atomic and molecular manipulation with the scanning tunneling microscope, Science 254, 1319–1326 (1991)
J. Nole: Holographic lithography needs no mask, Laser Focus World 33, 209–212 (1997)
A.N. Broers, A.C.F. Hoole, J.M. Ryan: Electron beam lithography – Resolution limits, Microelectron. Eng. 32, 131–142 (1996)
A.N. Broers, W. Molzen, J. Cuomo, N. Wittels: Electron-beam fabrication of 80 Åmetal structures, Appl. Phys. Lett. 29, 596 (1976)
G.D. Aumiller, E.A. Chandross, W.J. Tomlinson, H.P. Weber: Submicrometer resolution replication of relief patterns for integrated optics, J. Appl. Phys. 45, 4557–4562 (1974)
Y. Xia, J.J. McClelland, R. Gupta, D. Qin, X.-M. Zhao, L.L. Sohn, R.J. Celotta, G.M. Whiteside: Replica molding using polymeric materials: A practical step toward nanomanufacturing, Adv. Mater. 9, 147–149 (1997)
T. Borzenko, M. Tormen, G. Schmidt, L.W. Molenkamp, H. Janssen: Polymer bonding process for nanolithography, Appl. Phys. Lett. 79, 2246–2248 (2001)
H. Hua, Y. Sun, A. Gaur, M.A. Meitl, L. Bilhaut, L. Rotinka, J. Wang, P. Geil, M. Shim, J.A. Rogers: Polymer imprint lithography with molecular-scale resolution, Nano Lett. 4(12), 2467–2471 (2004)
A. Kumar, G.M. Whitesides: Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching, Appl. Phys. Lett. 63, 2002–2004 (1993)
Y. Xia, G.M. Whitesides: Soft lithography, Angew. Chem. Int. Ed. 37, 550–575 (1998)
Y. Xia, J.A. Rogers, K.E. Paul, G.M. Whitesides: Unconventional methods for fabricating and patterning nanostructures, Chem. Rev. 99, 1823–1848 (1999)
J.A. Rogers, R.J. Jackman, J.L. Wagener, A.M. Vengsarkar, G.M. Whitesides: Using microcontact printing to generate photomasks on the surface of optical fibers: A new method for producing in-fiber gratings, Appl. Phys. Lett. 70, 7–9 (1997)
B. Michel, A. Bernard, A. Bietsch, E. Delamarche, M. Geissler, D. Juncker, H. Kind, J.P. Renault, H. Rothuizen, H. Schmid, P. Schmidt-Winkel, R. Stutz, H. Wolf: Printing meets lithography: soft approaches to high-resolution printing, IBM J. Res. Dev. 45, 697–719 (2001)
J.A. Rogers: Rubber stamping for plastic electronics and fiber optics, MRS Bulletin 26, 530–534 (2001)
N.B. Larsen, H. Biebuyck, E. Delamarche, B. Michel: Order in microcontact printed self-assembled monolayers, J. Am. Chem. Soc. 119, 3017–3026 (1997)
H.A. Biebuyck, G.M. Whitesides: Self-organization of organic liquids on patterned self-assembled monolayers of alkanethiolates on gold, Langmuir 10, 2790–2793 (1994)
J.A. Rogers, Z. Bao, K. Baldwin, A. Dodabalapur, B. Crone, V.R. Raju, V. Kuck, H. Katz, K. Amundson, J. Ewing, P. Drzaic: Paper-like electronic displays: Large area, rubber stamped plastic sheets of electronics and electrophoretic inks, Proc. Natl. Acad. Sci. USA 98, 4835–4840 (2001)
J.L. Wilbur, H.A. Biebuyck, J.C. MacDonald, G.M. Whitesides: Scanning force microscopies can image patterned self-assembled monolayers, Langmuir 11, 825–831 (1995)
J.C. Love, D.B. Wolfe, M.L. Chabinyc, K.E. Paul, G.M. Whitesides: Self-assembled monolayers of alkanethiolates on palladium are good etch resists, J. Am. Chem. Soc. 124, 1576–1577 (2002)
H. Schmid, B. Michel: Siloxane polymers for high-resolution, high-accuracy soft lithography, Macromolecules 33, 3042–3049 (2000)
K. Choi, J.A. Rogers: A photocurable poly(dimethylsiloxane) chemistry for soft lithography in the nanometer regime, J. Am. Chem. Soc. 125, 4060–4061 (2003)
J.A. Rogers, K.E. Paul, G.M. Whitesides: Quantifying distortions in soft lithography, J. Vac. Sci. Technol. B 16, 88–97 (1998)
J. Tate, J.A. Rogers, C.D.W. Jones, W. Li, Z. Bao, D.W. Murphy, R.E. Slusher, A. Dodabalapur, H.E. Katz, A.J. Lovinger: Anodization and microcontact printing on electroless silver: solution-based fabrication procedures for low voltage organic electronic systems, Langmuir 16, 6054–6060 (2000)
Y. Xia, E. Kim, G.M. Whitesides: Microcontact printing of alkanethiols on silver and its application to microfabrication, J. Electrochem. Soc. 143, 1070–1079 (1996)
Y.N. Xia, X.M. Zhao, E. Kim, G.M. Whitesides: A selective etching solution for use with patterned self-assembled monolayers of alkanethiolates on gold, Chem. Mater. 7, 2332–2337 (1995)
R.J. Jackman, J. Wilbur, G.M. Whitesides: Fabrication of submicrometer features on curved substrates by microcontact printing, Science 269, 664–666 (1995)
R.J. Jackman, S.T. Brittain, A. Adams, M.G. Prentiss, G.M. Whitesides: Design and fabrication of topologically complex, three-dimensional microstructures, Science 280, 2089–2091 (1998)
J.A. Rogers, R.J. Jackman, G.M. Whitesides: Microcontact printing and electroplating on curved substrates: A new means for producing free-standing three-dimensional microstructures with possible applications ranging from micro-coil springs to coronary stents, Adv. Mater. 9, 475–477 (1997)
Y.-L. Loo, R.W. Willett, K. Baldwin, J.A. Rogers: Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: applications in plastic electronics, Appl. Phys. Lett. 81, 562–564 (2002)
Y.-L. Loo, R.W. Willett, K. Baldwin, J.A. Rogers: Interfacial chemistries for nanoscale transfer printing, J. Am. Chem. Soc. 124, 7654–7655 (2002)
Y.-L. Loo, J.W.P. Hsu, R.L. Willett, K.W. Baldwin, K.W. West, J.A. Rogers: High-resolution transfer printing on GaAs surfaces using alkane dithiol self-assembled monolayers, J. Vac. Sci. Technol. B 20, 2853–2856 (2002)
G.S. Ferguson, M.K. Chaudhury, G.B. Sigal, G.M. Whitesides: Contact adhesion of thin gold-films on elastomeric supports – cold welding under ambient conditions, Science 253, 776–778 (1991)
W. Zhang, S.Y. Chou: Multilevel nanoimprint lithography with submicron alignment over 4 in Si wafers, Appl. Phys. Lett. 79, 845–847 (2001)
N. Bowden, S. Brittain, A.G. Evans, J.W. Hutchinson, G.M. Whitesides: Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer, Nature 393, 146–149 (1998)
E. Menard, L. Bilhaut, J. Zaumseil, J.A. Rogers: Improved surface chemistries, thin film deposition techniques, and stamp designs for nanotransfer printing, Langmuir 20, 6871–6878 (2004)
J. Zaumseil, M.A. Meitl, J.W.P. Hsu, B. Acharya, K.W. Baldwin, Y.-L. Loo, J.A. Rogers: Three-dimensional and multilayer nanostructures formed by nanotransfer printing, Nano Lett. 3, 1223–1227 (2003)
Z. Bao, J.A. Rogers, H.E. Katz: Printable organic and polymeric semiconducting materials and devices, J. Mater. Chem. 9, 1895–1904 (1999)
J.A. Rogers, Z. Bao, A. Dodabalapur, A. Makhija: Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting, printing and molding, IEEE Electron Dev. Lett. 21, 100–103 (2000)
J.A. Rogers, Z. Bao, A. Makhija: Non-photolithographic fabrication sequence suitable for reel-to-reel production of high performance organic transistors and circuits that incorporate them, Adv. Mater. 11, 741–745 (1999)
P. Mach, S. Rodriguez, R. Nortrup, P. Wiltzius, J.A. Rogers: Active matrix displays that use printed organic transistors and polymer dispersed liquid crystals on flexible substrates, Appl. Phys. Lett. 78, 3592–3594 (2001)
J.A. Rogers: Toward paperlike displays, Science 291, 1502–1503 (2001)
Y.-L. Loo, T. Someya, K.W. Baldwin, P. Ho, Z. Bao, A. Dodabalapur, H.E. Katz, J.A. Rogers: Soft, conformable electrical contacts for organic transistors: High resolution circuits by lamination, Proc. Natl. Acad. Sci. USA 99, 10252–10256 (2002)
C. Kim, P.E. Burrows, S.R. Forrest: Micropatterning of organic electronic devices by cold-welding, Science 288, 831–833 (2000)
C. Kim, M. Shtein, S.R. Forrest: Nanolithography based on patterned metal transfer and its application to organic electronic devices, Appl. Phys. Lett. 80, 4051–4053 (2002)
J.A. Rogers, R.J. Jackman, G.M. Whitesides, D.L. Olson, J.V. Sweedler: Using microcontact printing to fabricate microcoils on capillaries for high resolution 1H-NMR on nanoliter volumes, Appl. Phys. Lett. 70, 2464–2466 (1997)
J.A. Rogers, R.J. Jackman, G.M. Whitesides: Constructing single and multiple helical microcoils and characterizing their performance as components of microinductors and microelectromagnets, J. Microelectromech. Syst. 6, 184–192 (1997)
R.J. Jackman, J.A. Rogers, G.M. Whitesides: Fabrication and characterization of a concentric, cylindrical microtransformer, IEEE Trans. Magn. 33, 2501–2503 (1997)
J.A. Rogers, M. Meier, A. Dodabalapur: Using stamping and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers, Appl. Phys. Lett. 73, 1766–1768 (1998)
M. Berggren, A. Dodabalapur, R.E. Slusher, A. Timko, O. Nalamasu: Organic solid-state lasers with imprinted gratings on plastic substrates, Appl. Phys. Lett. 72, 410–411 (1998)
J.A. Rogers, M. Meier, A. Dodabalapur: Distributed feedback ridge waveguide lasers fabricated by nanoscale printing and molding on non-planar substrates, Appl. Phys. Lett. 74, 3257–3259 (1999)
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Menard, E., Rogers, J.A. (2010). Stamping Techniques for Micro- and Nanofabrication. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_10
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