Abstract
Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles’ dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Pethig R and Markx GH (1997) Applications of dielectrophoresis in biotechnology. Trends Biotechnol 15: 426–432
Ramos A, Morgan H, Green NG et al. (1998) AC electrokinetics: a review of forces in microelectrode structures. J Phys D: Appl Phys 31:2338–2353
Green NG, Ramos A, and Morgan H (2000) AC electrokinetics: a survey of submicrometre particle dynamics. J Phys D: Appl Phys 33:632–641
Hughes MP (2000) AC electrokinetics: applications for nanotechnology. Nanotechnology 11:124–132
Fiedler S, Shirley SG, Schnelle T et al. (1998) Dielectrophoretic sorting of particles and cells in a microsystem. Anal Chem 70:1909–1915
Wang XB, Huang Y, Gascoyne PRC et al. (1997) Dielectrophoretic manipulation of particles. IEEE Trans Industry Appl 33:660–669
Schnelle T, Muller T, Gradl G et al. (1999) Paired microelectrode system: dielectrophoretic particle sorting and force calibration. J Electrostatics 47:121–132
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Kadri, N.A., Hoettges, K.F., Hughes, M.P. (2008). Microelectrode Fabrication Using Indium Tin Oxide (ITO) For Microfluidic Devices Employing Dielectrophoresis. In: Abu Osman, N.A., Ibrahim, F., Wan Abas, W.A.B., Abdul Rahman, H.S., Ting, HN. (eds) 4th Kuala Lumpur International Conference on Biomedical Engineering 2008. IFMBE Proceedings, vol 21. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-69139-6_179
Download citation
DOI: https://doi.org/10.1007/978-3-540-69139-6_179
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-69138-9
Online ISBN: 978-3-540-69139-6
eBook Packages: EngineeringEngineering (R0)