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Microelectrode Fabrication Using Indium Tin Oxide (ITO) For Microfluidic Devices Employing Dielectrophoresis

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Part of the book series: IFMBE Proceedings ((IFMBE,volume 21))

Abstract

Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles’ dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient.

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Correspondence to Nahrizul Adib Kadri .

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© 2008 Springer-Verlag Berlin Heidelberg

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Kadri, N.A., Hoettges, K.F., Hughes, M.P. (2008). Microelectrode Fabrication Using Indium Tin Oxide (ITO) For Microfluidic Devices Employing Dielectrophoresis. In: Abu Osman, N.A., Ibrahim, F., Wan Abas, W.A.B., Abdul Rahman, H.S., Ting, HN. (eds) 4th Kuala Lumpur International Conference on Biomedical Engineering 2008. IFMBE Proceedings, vol 21. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-69139-6_179

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  • DOI: https://doi.org/10.1007/978-3-540-69139-6_179

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-69138-9

  • Online ISBN: 978-3-540-69139-6

  • eBook Packages: EngineeringEngineering (R0)

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