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Next-Generation ADCs, High-Performance Power Management, and Technology Considerations for Advanced Integrated Circuits pp 243–251Cite as

Accuracy: The Next Opportunity for MEMS

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Abstract

Microelectromechanical systems (MEMS) experienced a huge growth in recent years, thanks to the widespread adoption in personal electronics. Driven by demanding consumer applications, the accuracy of MEMS-based devices is now in line with the requirements of industrial and automotive markets, thus opening new business opportunities. STMicroelectronics portfolio of MEMS devices leverages the company 20 years-long experience to provide tailored solutions that balance performance trade-offs to best address different market segments. This paper presents the main opportunities for MEMS-based devices in the fields of smart industry and smart driving and discusses the key parameters that qualify high-accuracy sensors: noise, stability and tolerance. The ASM330LHH, a 6× Inertial Measurement Unit for automotive applications, is presented as the basis for discussing main IC design guidelines to obtain superior performance.

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References

  1. ASM330LHH datasheet. https://www.st.com/resource/en/datasheet/asm330lhh.pdf

  2. LSM6DSO datasheet. https://www.st.com/resource/en/datasheet/lsm6dso.pdf

  3. S. Facchinetti et al., Development of a complete model to evaluate the zero rate level drift over temperature in Coriolis vibrating gyroscopes, in 2017 IEEE Inertial Sensors & Systems, Conference Proceeding (IEEE, Piscataway, 2017), pp. 125–128

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Authors and Affiliations

  1. AMS MEMS Sensors Division, STMicroelectronics, Milan, Italy

    Andrea Onetti

Authors
  1. Andrea Onetti
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Correspondence to Andrea Onetti .

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Editors and Affiliations

  1. Department of Physics “G. Occhialini”, University of Milan-Bicocca, Milan, Italy

    Andrea Baschirotto

  2. Eindhoven University of Technology, Eindhoven, Noord-Brabant, The Netherlands

    Pieter Harpe

  3. Delft University of Technology, Delft, Zuid-Holland, The Netherlands

    Kofi A. A. Makinwa

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Onetti, A. (2020). Accuracy: The Next Opportunity for MEMS. In: Baschirotto, A., Harpe, P., Makinwa, K. (eds) Next-Generation ADCs, High-Performance Power Management, and Technology Considerations for Advanced Integrated Circuits. Springer, Cham. https://doi.org/10.1007/978-3-030-25267-0_15

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  • DOI: https://doi.org/10.1007/978-3-030-25267-0_15

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-25266-3

  • Online ISBN: 978-3-030-25267-0

  • eBook Packages: EngineeringEngineering (R0)

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