Abstract
Among X-ray cross-sectional imaging methods, digital tomosynthesis (DT) is very useful to PCB inspection because it can obtain a cross-sectional image of a local inspection area quickly. The image intensifier, which is usually used in DT systems, distorts X-ray images in shape and intensity. Therefore, image distortion correction is one of the most important issues in realizing a DT system. This paper presents an image distortion correction method to acquire an arbitrary cross-sectional image of an object by using a distance ratio function in an X-ray DT system. The method uses a simplified distortion model made by a distance ratio function in intensity correction, and by the 2D point mapping polynomials in shape correction.
Chapter PDF
References
Adams, J.: X-ray laminography analysis of ultra fine pitch solder connections on ultra-thin boards. In: SPIE Integrated Circuit Metrology, Inspection, and Process Control, vol. 1464, pp. 484–497 (1991)
Moore, T.D., Vanderstraeten, D., Forssell, P.M.: Three-dimensional x-ray laminography as a tool for detection and characterization of BGA package defects. IEEE Tr. on Components and Packaging Technologies 25(2), 224–229 (2002)
Bossi, R.H., Georgeson, G.E.: Casting development savings with X-ray computed tomography. Casting, 181–188 (1993)
Bocage, E.M.: French Patent 536464 (1922)
Rooks, M., Sack, T.: X-ray inspection of flip chip attach using digital tomosynthesis. Circuit World 21(3), 51–55 (1995)
Bord, S., Clement, A., Lecomte, J.C., Marmeggi, J.C.: An X-ray tomography facility for IC industry at STMicroelectronics Grenoble. Microelectronic engineering 62, 1069–1075 (2002)
Sumimoto, T., Maruyamay, T., Azuma, Y., Goto, S., Mondo, M., Furukawa, N., Okada, S.: Detection of defects at BGA solder joints by using X-ray imaging. In: 2002 IEEE Int. Conf. on Industrial Technology, vol. 1, pp. 238–241 (2002)
Roh, Y.J., Ko, K.W., Cho, H.S., Kim, J.Y., Byun, J.E.: The calibration of X-ray digital tomosynthesis system including the compensation of the image distortion. In: SPIE Symp. on Intelligent Systems and Advanced Manufacturing VII, vol. 3528, pp. 248–259 (1998)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2005 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Kim, J.Y. (2005). An Efficient Image Distortion Correction Method for an X-ray Digital Tomosynthesis System. In: Pal, S.K., Bandyopadhyay, S., Biswas, S. (eds) Pattern Recognition and Machine Intelligence. PReMI 2005. Lecture Notes in Computer Science, vol 3776. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11590316_66
Download citation
DOI: https://doi.org/10.1007/11590316_66
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-30506-4
Online ISBN: 978-3-540-32420-1
eBook Packages: Computer ScienceComputer Science (R0)