Microtechnology and MEMS

Book Series
There are 23 volumes in this series
Published 2001 - 2020

About this series

The series Microtechnology and MEMS comprises textbooks, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students.