About this series
The series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas. The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies. It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies. This publication will provide inspiration for innovative research and application ideas for continued growth of the field. Micro-/nanotechnologies are techniques to fabricate and build systems with dimensions ranging from nanometers to microns. Advances in these technologies have created many interdisciplinary research opportunities and have been applied in various areas from nanomedicine to space systems. After several decades of development, a knowledge base of micro-/nanotechnologies covering all areas of research has now been created. It includes design and simulation, fabrication and manufacturing, packaging and assembly, device and system technologies, and application in different areas.