Table of contents

  1. D. L. Beke
    Pages 1-23
  2. H. Bracht, N. A. Stolwijk
    Pages 1-11
  3. H. Bracht, N. A. Stolwijk
    Pages 12-134
  4. H. Bracht, N. A. Stolwijk
    Pages 135-163
  5. H. Bracht, N. A. Stolwijk
    Pages 164-195
  6. H. Bracht, N. A. Stolwijk
    Pages 196-221
  7. H. Bracht, N. A. Stolwijk
    Pages 222-240
  8. H. Bracht, N. A. Stolwijk
    Pages 241-257
  9. M. B. Dutt, B. L. Sharma
    Pages 1-63
  10. M. B. Dutt, B. L. Sharma
    Pages 64-69
  11. M. B. Dutt, B. L. Sharma
    Pages 70-87
  12. P. Gas, F. M. d’Heurle
    Pages 1-38
  13. C. M. Bruff, G. E. Murch
    Pages 1-25
  14. C. E. Allen, E. G. Seebauer
    Pages 1-20

About this book

Introduction

Subvolume A of two subvolumes on Diffusion in Semiconductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.

Keywords

Halbleiter Halbleiterdiffusion diffusion in semiconductors semiconductor semiconductors

Bibliographic information

  • DOI https://doi.org/10.1007/b53031
  • Copyright Information Springer-Verlag Berlin Heidelberg 1998
  • Publisher Name Springer, Berlin, Heidelberg
  • Print ISBN 978-3-540-60964-3
  • Online ISBN 978-3-540-49748-6
  • Series Print ISSN 1615-1925
  • Series Online ISSN 1616-9549
  • About this book