Physical Principles of Electron Microscopy

An Introduction to TEM, SEM, and AEM

  • Ray F. Egerton

Table of contents

  1. Front Matter
    Pages i-xii
  2. Ray F. Egerton
    Pages 1-25
  3. Ray F. Egerton
    Pages 27-55
  4. Ray F. Egerton
    Pages 57-92
  5. Ray F. Egerton
    Pages 93-124
  6. Ray F. Egerton
    Pages 125-153
  7. Ray F. Egerton
    Pages 155-175
  8. Ray F. Egerton
    Pages 177-189
  9. Back Matter
    Pages 191-202

About this book


Scanning and stationary-beam electron microscopes have become an indispensable tool for both research and routine evaluation in materials science, the semiconductor industry, nanotechnology, and the biological and medical sciences. Physical Principles of Electron Microscopy provides an introduction to the theory and current practice of electron microscopy for undergraduate students who want to acquire an appreciation of how basic principles of physics are utilized in an important area of applied science, and for graduate students and technologists who make use of electron microscopes. At the same time, this book will be equally valuable for university teachers and researchers who need a concise supplemental text that deals with the basic principles of microscopy.


Microscopy Monochromator Transmission X-ray Emission Spectroscopy crystal diffraction electron microscope electron microscopy nanotechnology optical microscope optics scanning electron microscope scanning transmission electron microscope spectroscopy transmission electron microscopy

Authors and affiliations

  • Ray F. Egerton
    • 1
  1. 1.Department of PhysicsUniversity of AlbertaEdmontonCanada

Bibliographic information