Advertisement

About this book

Introduction

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.

Keywords

Dispersion crystal diffraction lattice parameter scattering thin films

Bibliographic information

  • DOI https://doi.org/10.1007/BFb0109385
  • Copyright Information Springer-Verlag 1999
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-540-62029-7
  • Online ISBN 978-3-540-49625-0
  • Series Print ISSN 0081-3869
  • Series Online ISSN 1615-0430
  • Buy this book on publisher's site