Heterogeneous Integrations

  • John H.┬áLau

Table of contents

About this book


Heterogeneous integration uses packaging technology to integrate dissimilar chips, LED, MEMS, VCSEL, etc. from different fabless houses and with different functions and wafer sizes into a single system or subsystem. How are these dissimilar chips and optical components supposed to talk to each other? The answer is redistribution layers (RDLs). This book addresses the fabrication of RDLs for heterogeneous integrations, and especially focuses on RDLs on: A) organic substrates, B) silicon substrates (through-silicon via (TSV)-interposers), C) silicon substrates (bridges), D) fan-out substrates, and E) ASIC, memory, LED, MEMS, and VCSEL systems. The book offers a valuable asset for researchers, engineers, and graduate students in the fields of semiconductor packaging, materials sciences, mechanical engineering, electronic engineering, telecommunications, networking, etc.


System-on-Chip System-in-Package Heterogeneous Integration Redistribution-Layers Silicon Substrates (TSV-Interposers) Silicon Substrates (Bridges) Organic Substrates (Build-Up Layers) Fan-Out Substrates (TSV-Less Interposers) Multichips (ASIC, Memory, GPU, CPU, etc.) Photonics (MEMS, LED, VCSEL, etc.)

Authors and affiliations

  • John H.┬áLau
    • 1
  1. 1.ASM Pacific TechnologyHong KongHong Kong

Bibliographic information

  • DOI
  • Copyright Information Springer Nature Singapore Pte Ltd. 2019
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-13-7223-0
  • Online ISBN 978-981-13-7224-7
  • Buy this book on publisher's site