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Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

  • Ludwig Reimer

Part of the Springer Series in Optical Sciences book series (SSOS, volume 45)

Table of contents

  1. Front Matter
    Pages I-XVIII
  2. Ludwig Reimer
    Pages 1-12
  3. Ludwig Reimer
    Pages 57-127
  4. Ludwig Reimer
    Pages 128-175
  5. Ludwig Reimer
    Pages 176-226
  6. Ludwig Reimer
    Pages 313-364
  7. Ludwig Reimer
    Pages 365-403
  8. Back Matter
    Pages 405-462

About this book

Introduction

The aim of this book is to outline the physics of image formation, electron­ specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron­ specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec­ tron beam can be blanked at high frequencies for time-resolving exper­ iments and what problems have tobe taken into account when focusing.

Keywords

Rasterelektronen Mikroskopie Scanning Tunneling Microscopy ASTER crystal diffraction electron electron microscope electron microscopy electron optics microscopy optics scanning electron microscope scanning electron microscopy scanning tunneling microscopy scattering transmission electron microscopy X-ray

Authors and affiliations

  • Ludwig Reimer
    • 1
  1. 1.Physikalisches InstitutWestfälische Wilhelms-Universität MünsterMünsterFed. Rep. of Germany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-13562-4
  • Copyright Information Springer-Verlag Berlin Heidelberg 1985
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-662-13564-8
  • Online ISBN 978-3-662-13562-4
  • Series Print ISSN 0342-4111
  • Series Online ISSN 1556-1534
  • Buy this book on publisher's site