Si Silicon

Silicon Nitride in Microelectronics and Solar Cells

  • Eberhard F. Krimmel
  • Rudolf Hezel
  • Uwe Nohl
  • Rainer Bohrer
  • Alfred Pebler
  • Friedrich Schröder

Part of the Si. Silicium. Silicon (System-Nr. 15) book series (GMELIN, volume S-i / B / 1-5 / 5 / c)

Table of contents

  1. Front Matter
    Pages N2-XV
  2. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 1-2
  3. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 3-33
  4. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 34-71
  5. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 72-76
  6. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 77-79
  7. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 80-98
  8. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 99-118
  9. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 119-138
  10. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 139-152
  11. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 153-154
  12. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 155-160
  13. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 161-188
  14. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 189-200
  15. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 201-203
  16. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 204-205
  17. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 206-220
  18. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 221-232
  19. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 233-238
  20. Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 239-242

About this book

Introduction

This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec­ tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non­ specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci­ fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1.

Keywords

Sensor Standard chemistry medicine microelectronics silicon

Authors and affiliations

  • Eberhard F. Krimmel
    • 1
  • Rudolf Hezel
    • 2
  • Uwe Nohl
    • 3
  • Rainer Bohrer
    • 3
  1. 1.Universität Frankfurt/MainGermany
  2. 2.Universität ErlangenNürnbergGermany
  3. 3.Gmelin InstituteFrankfurt/MainGermany

Editors and affiliations

  • Alfred Pebler
    • 1
  • Friedrich Schröder
    • 1
  1. 1.Gmelin InstituteFrankfurt/MainGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-09901-8
  • Copyright Information Springer-Verlag Berlin Heidelberg 1991
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-662-09903-2
  • Online ISBN 978-3-662-09901-8
  • About this book