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Modelling of Microfabrication Systems

  • Raja Nassar
  • Weizhong Dai

Part of the Microtechnology and MEMS book series (MEMS)

Table of contents

  1. Front Matter
    Pages I-X
  2. Raja Nassar, Weizhong Dai
    Pages 1-28
  3. Raja Nassar, Weizhong Dai
    Pages 29-76
  4. Raja Nassar, Weizhong Dai
    Pages 77-121
  5. Raja Nassar, Weizhong Dai
    Pages 123-158
  6. Raja Nassar, Weizhong Dai
    Pages 159-219
  7. Raja Nassar, Weizhong Dai
    Pages 221-248
  8. Back Matter
    Pages 249-269

About this book

Introduction

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

Keywords

Chemical vapor deposition High Aspect Ratio Ion beam Laser ablation MEMS Microtechnology Photopolymerization X-ray lithography development laser machining microelectromechanical system (MEMS) microsystems modeling optimization

Authors and affiliations

  • Raja Nassar
    • 1
  • Weizhong Dai
    • 1
  1. 1.Faculty of Mathematics and StatisticsLouisiana Technical UniversityRustonUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-08792-3
  • Copyright Information Springer-Verlag Berlin Heidelberg 2003
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-05536-2
  • Online ISBN 978-3-662-08792-3
  • Series Print ISSN 1615-8326
  • Buy this book on publisher's site