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Physical Principles and Technical Implementation

  • Book
  • © 2004


  • An important advantage of this book against monographs devoted to one detailed method of epitaxial crystallization, e.g. MBE, CBE, MOVPE or ALE, is that it allows the non-specialist in the definite growth technique to learn about the characteristic technological features of all the other methods
  • Contains an up-dated reference list of more than 1000 positions
  • Includes supplementary material:

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 62)

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About this book

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy’s coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.



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Table of contents (16 chapters)

  1. Basic Concepts

  2. Technical Implementation

  3. In-situ Analysis of the Growth Processes

  4. Physics of Epitaxy

  5. Heteroepitaxy


From the reviews:

"Epitaxy has become increasingly important … . Still, a good monograph on this issue was lacking …. This gap is finally filled with a book that finds a good equilibrium … . As such, it will be very useful to students who are interested in advanced thin film growth, and researchers active in the field of low-dimensional heterostructures. … Throughout the work, a large number of references are cited … . this book will be a good guide for people interested in the growth and properties of low dimensional heterostructures and nanostructures." (André Vantomme, Physicalia, Vol. 57 (3), 2005)

"The book … contains experimental and theoretical aspects of the epitaxial growth process including very recent developments in a compact and clear manner. … represents a good opportunity for the interested reader to get used to the field of epitaxial growth of materials and should be of high interest to students, scientists, and engineers working in the field of material research, device research, and solid state physics or –chemistry. … this book should become a indispensable source of information for all crystal growers." (V. Gottschalch, Zeitschrift für Kristallographie, Issue: 11, 2004)

"In a uniform and comprehensive manner the authors describe all the important aspects of the epitaxial growth processes of solid films on crystalline substrates … . Emphasis is put on sufficiently fundamental and unequivocal presentation of the subject in the form of an easy-to-read review." (Zeitschrift für Kristallographie, Issue: 10, 2004)

Authors and Affiliations

  • Wissenschaftliches Zentrum, Polnischen Akademie der Wissenschaften, Wien, Austria

    Marian A. Herman

  • Institut für Festkörperphysik, Technische Universität Berlin, Berlin, Germany

    Wolfgang Richter

  • INFM, Dipartimento di Fisica, Università di Roma Tor Vergata, Roma, Italy

    Wolfgang Richter

  • Johannes-Kepler-Universität, Linz, Austria

    Helmut Sitter

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