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  • Book
  • Open Access
  • © 2022

Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

Authors:

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  • current challenges in surface metrology with a single, new interferometric approach

  • A novel metrology to enhance current high-precision surface manufacturing technologies

  • This is an Open Access-book

  • 3469 Accesses

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USD 49.99
Price excludes VAT (USA)

Table of contents (6 chapters)

  1. Front Matter

    Pages i-xxiii
  2. Introduction and Motivation

    • Christopher Taudt
    Pages 1-3Open Access
  3. Related Works and Basic Considerations

    • Christopher Taudt
    Pages 5-37Open Access
  4. Surface Profilometry

    • Christopher Taudt
    Pages 39-88Open Access
  5. Polymer Characterization

    • Christopher Taudt
    Pages 89-121Open Access
  6. Thin-film Characterization

    • Christopher Taudt
    Pages 123-130Open Access
  7. Conclusion

    • Christopher Taudt
    Pages 131-135Open Access
  8. Back Matter

    Pages 137-163

About this book

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 ┬Ám with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.

About the Author
Christopher Taudt holds a diploma degree in Mechanical Engineering of the WH Zwickau. During a stay at the IT Sligo, Ireland, he earned a Bachelor Degree in Mechanical Engineering. After his studies, Christopher Taudt has worked on research projects in optical metrology and earned a PhD in optical metrology from the TU Dresden.

Keywords

  • surface metrology
  • profilometry
  • interferometry
  • low-coherence interferometry
  • semiconductor manufacturing
  • optical metrology
  • Open Access

Authors and Affiliations

  • Faculty of Electrical and Computer Engineering, TU Dresden, Dresden, Germany

    Christopher Taudt

About the author

Christopher Taudt holds a diploma degree in Mechanical Engineering of the WH Zwickau. During a stay at the IT Sligo, Ireland, he earned a Bachelor Degree in Mechanical Engineering. After his studies, Christopher Taudt has worked on research projects in optical metrology and earned a PhD in optical metrology from the TU Dresden.

Bibliographic Information

  • Book Title: Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

  • Authors: Christopher Taudt

  • DOI: https://doi.org/10.1007/978-3-658-35926-3

  • Publisher: Springer Vieweg Wiesbaden

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: The Editor(s) (if applicable) and The Author(s) 2022

  • License: CC BY

  • Softcover ISBN: 978-3-658-35925-6

  • eBook ISBN: 978-3-658-35926-3

  • Edition Number: 1

  • Number of Pages: XXIII, 163

  • Number of Illustrations: 65 illustrations in colour

  • Topics: Laser Technology, Optical Metrology

Buying options

Softcover Book
USD 49.99
Price excludes VAT (USA)