Silicon Chemical Etching

  • Editors
  • J. Grabmaier

Part of the Crystals book series (CRYSTALS, volume 8)

Table of contents

  1. Front Matter
    Pages i-vii
  2. Werner Zulehner, Diethart Huber
    Pages 1-143
  3. Raymond G. Seidensticker
    Pages 145-172
  4. Back Matter
    Pages 225-228

About these proceedings

Introduction

In the first contribution to this volume we read that the world-wide production of single­ crystal silicon amounts to some 2000 metric tons per year. Given the size of present-day silicon-crystals, this number is equivalent to 100000 silicon-crystals grown every year by either the Czochralski (80%) or the floating-zone (20%) technique. But, to the best of my knowledge, no coherent and comprehensive article has been written that deals with "the art and science", as well as the practical and technical aspects of growing silicon­ crystals by the Czochralski technique. The same could be said about the floating-zone technique were it not for the review article by W. Dietze, W. Keller and A. Miihlbauer which was published in the preceding Volume 5 ("Silicon") of this series (and for a monograph by two of the above authors published about the same time). As editor of this volume I am very glad to have succeeded in persuading two scien­ tists, W. Zulehner and D. Huber, of Wacker-Chemitronic GmbH - the world's largest producer of silicon-crystals - to write a comprehensive article about the practical and scientific aspects of growing silicon-crystals by the Czochralski method and about silicon­ wafer manufacture. I am sure that many scientists or engineers who work with silicon­ crystals -be it in the laboratory or in a production environment - will profit from the first article in this volume.

Keywords

Czochralski-Verfahren Dendritische Kristallisation Einkristall Silizium crystal crystallization environment iron silicon Ätzen

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-68765-5
  • Copyright Information Springer-Verlag Berlin Heidelberg 1982
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-68767-9
  • Online ISBN 978-3-642-68765-5
  • Series Print ISSN 0172-5076
  • About this book