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Table of contents (10 chapters)
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Front Matter
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Back Matter
Authors and Affiliations
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Fraunhofer-Institut für Produktionstechnik und Automatisierung (IPA), Stuttgart, Deutschland
Klaus-Dieter Sauter
Bibliographic Information
Book Title: Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen
Authors: Klaus-Dieter Sauter
Series Title: IPA-IAO - Forschung und Praxis
DOI: https://doi.org/10.1007/978-3-642-47941-0
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag, Berlin, Heidelberg 1990
Softcover ISBN: 978-3-540-53236-1Published: 07 November 1990
eBook ISBN: 978-3-642-47941-0Published: 08 March 2013
Edition Number: 1
Number of Pages: 118
Topics: Control and Systems Theory, Organization, Control, Robotics, Mechatronics, Engineering Economics, Organization, Logistics, Marketing, Electronics and Microelectronics, Instrumentation