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  • Book
  • © 2004

Applied Scanning Probe Methods I

  • First book summarizing the state-of-the-art of this technique

  • Real industrial applications included

  • Includes supplementary material: sn.pub/extras

Part of the book series: NanoScience and Technology (NANO)

Buying options

eBook USD 189.00
Price excludes VAT (USA)
  • ISBN: 978-3-642-35792-3
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Softcover Book USD 249.99
Price excludes VAT (USA)
Hardcover Book USD 249.99
Price excludes VAT (USA)

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Table of contents (16 chapters)

  1. Front Matter

    Pages I-XX
  2. Scanning Probe Microscopy

    1. Front Matter

      Pages 1-1
    2. Dynamic Force Microscopy

      • André Schirmeisen, Boris Anczykowski, Harald Fuchs
      Pages 3-39
    3. Atomic Force Microscopy with Lateral Modulation

      • Volker Scherer, Michael Reinstädtler, Walter Arnold
      Pages 75-115
    4. Sensor Technology for Scanning Probe Microscopy

      • Egbert Oesterschulze, Rainer Kassing
      Pages 117-146
    5. Tip Characterization for Dimensional Nanometrology

      • John S. Villarrubia
      Pages 147-168
  3. Characterization

    1. Front Matter

      Pages 169-169
    2. Displacement and Strain Field Measurements from SPM Images

      • Jürgen Keller, Dietmar Vogel, Andreas Schubert, Bernd Michel
      Pages 253-276
    3. AFM Characterization of Semiconductor Line Edge Roughness

      • Ndubuisi G. Orji, Martha I. Sanchez, Jay Raja, Theodore V. Vorburger
      Pages 277-301

About this book

This volume examines the physical and technical foundation for recent progress in applied near-field scanning probe techniques. It constitutes a timely comprehensive overview of SPM applications, now that industrial applications span topographic and dynamical surface studies of thin-film semiconductors, polymers, paper, ceramics, and magnetic and biological materials. After laying the theoretical background of static and dynamic force microscopies, including sensor technology and tip characterization, contributions detail applications such as macro- and nanotribology, polymer surfaces, and roughness investigations. The final part on industrial research addresses special applications of scanning force nanoprobes such as atomic manipulation and surface modification, as well as single electron devices based on SPM. Scientists and engineers either using or planning to use SPM techniques will benefit from the international perspective assembled in the book.

Keywords

  • AFM
  • Material Science
  • Physical Chemistry
  • ceramics
  • chemistry
  • microscopy
  • modeling
  • nanoscience
  • nanotribology
  • polymer
  • surfaces

Reviews

From the reviews:

"The editors have done an excellent job of maintaining a coherent theme throughout, while keeping the repetition of ideas to a minimum. It is therefore effective when read as a whole but will also find good use as a reference book."..…"This is an excellent book for all users of SPM interested in real technological applications".
Steven R. Schofield, School of Mathematical and Physical Sciences, University of Newcastle
Journal: "The Physicist", Vol. 41, No. 6, p. 200

"This book describes some of the many ways in which SPMs are being used in the development and characterisation of real nano technological processes and devices. The editors have done an excellent job of maintaining a coherent theme throughout … . It is therefore effective when read as a whole but will also find good use as a reference book. … This is an excellent book for all users of SPM interested in real technological applications." (Steven R Schofield, The Physicist, Vol. 41 (6), November/December, 2004)

"The focus of this book is recent, practical applications of scanning probe microscopy (SPM). Because it is written by leading experts in SPM techniques, the book is strongly recommended to those working in the emerging area of nanotechnology. … Each chapter contains the relevant references and the book ends with a comprehensive index." (Mircea Dragoman, Optics and Photonics News, April, 2006)

Authors and Affiliations

  • Department of Mechanical Engineering, The Ohio State University, Columbus, USA

    Bharat Bhushan

  • Universität Münster, Münster, Germany

    Harald Fuchs

  • Dept. Electronic Engineering, Gunma University, Kiryu-City, Japan

    Sumio Hosaka

Bibliographic Information

Buying options

eBook USD 189.00
Price excludes VAT (USA)
  • ISBN: 978-3-642-35792-3
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Softcover Book USD 249.99
Price excludes VAT (USA)
Hardcover Book USD 249.99
Price excludes VAT (USA)