Overview
- This is the most comprehensive book available on this widely used analytical technique
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series in Surface Sciences (SSSUR, volume 49)
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Table of contents (10 chapters)
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Front Matter
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Back Matter
Keywords
About this book
To anyone who is interested in surface chemical analysis of materials on the nanometer scale, this book is prepared to give appropriate information. Based on typical application examples in materials science, a concise approach to all aspects of quantitative analysis of surfaces and thin films with AES and XPS is provided. Starting from basic principles which are step by step developed into practically useful equations, extensive guidance is given to graduate students as well as to experienced researchers. Key chapters are those on quantitative surface analysis and on quantitative depth profiling, including recent developments in topics such as surface excitation parameter and backscattering correction factor. Basic relations are derived for emission and excitation angle dependencies in the analysis of bulk material and of fractional nano-layer structures, and for both smooth and rough surfaces. It is shown how to optimize the analytical strategy, signal-to-noise ratio, certainty and detection limit. Worked examples for quantification of alloys and of layer structures in practical cases (e.g. contamination, evaporation, segregation and oxidation) are used to critically review different approaches to quantification with respect to average matrix correction factors and matrix relative sensitivity factors. State-of-the-art issues in quantitative, destructive and non-destructive depth profiling are discussed with emphasis on sputter depth profiling and on angle resolved XPS and AES. Taking into account preferential sputtering and electron backscattering corrections, an introduction to the mixing-roughness-information depth (MRI) model and its extensions is presented.
Authors and Affiliations
Bibliographic Information
Book Title: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science
Book Subtitle: A User-Oriented Guide
Authors: Siegfried Hofmann
Series Title: Springer Series in Surface Sciences
DOI: https://doi.org/10.1007/978-3-642-27381-0
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2013
Hardcover ISBN: 978-3-642-27380-3Published: 25 October 2012
Softcover ISBN: 978-3-642-43173-9Published: 09 November 2014
eBook ISBN: 978-3-642-27381-0Published: 25 October 2012
Series ISSN: 0931-5195
Series E-ISSN: 2198-4743
Edition Number: 1
Number of Pages: XX, 528
Topics: Solid State Physics, Spectroscopy and Microscopy, Surfaces and Interfaces, Thin Films