Introduction to Microsystem Design

  • Werner KarlĀ Schomburg

Part of the RWTHedition book series (RWTH, volume 1)

Table of contents

  1. Front Matter
    Pages i-xxi
  2. Werner Karl Schomburg
    Pages 1-2
  3. Werner Karl Schomburg
    Pages 3-4
  4. Werner Karl Schomburg
    Pages 5-7
  5. Werner Karl Schomburg
    Pages 9-20
  6. Werner Karl Schomburg
    Pages 21-27
  7. Werner Karl Schomburg
    Pages 29-52
  8. Werner Karl Schomburg
    Pages 53-64
  9. Werner Karl Schomburg
    Pages 65-84
  10. Werner Karl Schomburg
    Pages 85-106
  11. Werner Karl Schomburg
    Pages 107-130
  12. Werner Karl Schomburg
    Pages 131-136
  13. Werner Karl Schomburg
    Pages 137-157
  14. Werner Karl Schomburg
    Pages 159-176
  15. Werner Karl Schomburg
    Pages 177-189
  16. Werner Karl Schomburg
    Pages 191-201
  17. Werner Karl Schomburg
    Pages 203-228
  18. Werner Karl Schomburg
    Pages 229-250
  19. Werner Karl Schomburg
    Pages 251-252
  20. Werner Karl Schomburg
    Pages 253-260

About this book

Introduction

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.
For quick reference equations are presented in tables which are found in an index at the end of this book.

Keywords

Basic elements and effects Chracteristic curves Microsystem Design Systematic tables of equations

Authors and affiliations

  • Werner KarlĀ Schomburg
    • 1
  1. 1., Konstruktion und EntwicklungRWTH AachenAachenGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-19489-4
  • Copyright Information Springer-Verlag Berlin Heidelberg 2011
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-642-19488-7
  • Online ISBN 978-3-642-19489-4
  • Series Print ISSN 1865-0899
  • Series Online ISSN 1865-0902
  • About this book