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Microsystems and Nanotechnology

  • Zhaoying Zhou
  • Zhonglin Wang
  • Liwei Lin

Table of contents

  1. Front Matter
    Pages N1-xxii
  2. Fundamentals of Microsystem and Nanotechnology

    1. Front Matter
      Pages 1-1
    2. Zhi-Jian Li, Tian-Ling Ren
      Pages 3-43
    3. Chih-Ming Ho, Yu-Chong Tai
      Pages 45-69
    4. Bingchu Cai
      Pages 71-113
    5. Xudong Wang, Jun Zhou, Zhong Lin Wang
      Pages 115-147
    6. Aidi Zhao, Hui Zhang, J. G. Hou
      Pages 149-183
  3. Microsystem

    1. Front Matter
      Pages 185-185
    2. Yu-Chong Tai
      Pages 187-206
    3. Shanhong Xia, Deyong Chen, Zhimei Qi, Xiuli He, Chunrong Peng, Xianxiang Chen et al.
      Pages 207-260
    4. Yu-Chuan Su, Liwei Lin
      Pages 261-285
    5. Ming C. Wu, Jui-che Tsai, Wibool Piyawattanametha, Pamela R. Patterson
      Pages 353-414
    6. Mu Chiao, Yu-Ting Cheng, Liwei Lin
      Pages 415-446
  4. Nanotechnology

    1. Front Matter
      Pages 447-447
    2. Yi Zhang, Jun Hu, Xudong Xiao
      Pages 495-511
    3. Ampere A. Tseng, Zuliang Du, Andrea Notargiacomo, Shyankay Jou
      Pages 513-577
    4. Xinxin Li
      Pages 579-606
  5. Application Issues

    1. Front Matter
      Pages 607-607
    2. Zhaoying Zhou, Rong Zhu, Xu Fu, Ganghua Zhang
      Pages 619-651
    3. Shih-Chia (Scott) Chang
      Pages 721-757
    4. Dafu Cui
      Pages 759-818
    5. Stefan Haeberle, Daniel Mark, Felix von Stetten, Roland Zengerle
      Pages 853-895
  6. Development and Prospects

    1. Front Matter
      Pages 897-897
    2. Richard S. Muller, Wolfgang Menz, Masayoshi Esashi, Geoff Beardmore
      Pages 899-929
  7. Back Matter
    Pages 931-1004

About this book

Introduction

“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies.

Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Keywords

MEMs TUP microtechnology nanoscience

Editors and affiliations

  • Zhaoying Zhou
    • 1
  • Zhonglin Wang
    • 3
  • Liwei Lin
    • 2
  1. 1.Department of Precision Instruments & MechanologyTsinghua UniversityBeijingChina
  2. 2.Center for Nanostructure Characterization and Fabrication (CNCF)Georgia Institute of TechnologyAtlantaUSA
  3. 3.Department of Mechanical EngineeringUniversity of California at BerkeleyBerkeleyUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-18293-8
  • Copyright Information Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg 2012
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-642-18292-1
  • Online ISBN 978-3-642-18293-8
  • Buy this book on publisher's site