Extended Defects in Germanium

Fundamental and Technological Aspects

  • Cor Claeys
  • Eddy Simoen

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 118)

Table of contents

About this book

Introduction

The aim is to give an overview of the physics of extended defects in Germanium, i.e. dislocations (line defects), grain boundaries, stacking faults, twins and {311} defects (two-dimensional defects) and precipitates, bubbles, etc. The first part covers fundamentals, describing the crystallographic structure and other physical and electrical properties, mainly of dislocations. Since dislocations are essential for the plastic deformation of Germanium, methods for analysis and imaging of dislocations and to evaluate their structure are described. Attention is given to the electrical and optical properties, which are important for devices made in dislocated Ge. The second part treats the creation of extended defects during wafer and device processing. Issues are addressed such as defect formation during ion implantation, necessary to create junctions, which are an essential part in every device type. Extended defects are also created during the deposition of thin or thick epitaxial layers on other substrates, which are important for optoelectronic and photovoltaic applications. In brief, the book is intended to provide a fundamental understanding of the extended-defect formation during Ge materials and device processing, providing ways to distinguish harmful from less detrimental defects and should point out ways for defect engineering and control.

Keywords

Extended defects Germanium Processing Semiconductor devices crystal crystallography physics

Editors and affiliations

  • Cor Claeys
    • 1
  • Eddy Simoen
    • 1
  1. 1.Katholieke Universiteit Leuven, Interuniversity Microelectronics Center (IMEC)HeverleeBelgium

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-540-85614-6
  • Copyright Information Springer Berlin Heidelberg 2009
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-540-85611-5
  • Online ISBN 978-3-540-85614-6
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book