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Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

  • Book
  • © 1998
  • Latest edition


  • Main benefit is information about the physics of image formation and microanalysis in scanning electron microscopy
  • 2nd, completely revised and updated edition

Part of the book series: Springer Series in Optical Sciences (SSOS, volume 45)

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About this book

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

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Table of contents (10 chapters)


"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Authors and Affiliations

  • Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Münster, Germany

    Ludwig Reimer

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