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  • Book
  • © 2016

Fundamentals of Nanomechanical Resonators

Authors:

  1. Silvan Schmid

    1. Vienna University of Technology, Wien, Austria

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  2. Luis Guillermo Villanueva

    1. École Polytechnique Fédérale de, Lausanne, Switzerland

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  3. Michael Lee Roukes

    1. California Institute of Technology, Pasadena, USA

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  • Reviews exhaustively the key recent research into the design and fabrication of micro and nanomechanical resonators

  • Provides a complete set of mechanical models, including strings and membrane resonators

  • Maximizes reader insights into nanomechanical sensing, transduction, and noise and measurements for micro and nanomechanical resonators

Sections

eBook USD 89.00
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  • ISBN: 978-3-319-28691-4
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  • Readable on all devices
  • Own it forever
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Softcover Book USD 119.99
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Table of contents (5 chapters)

  1. Front Matter

    Pages i-viii
    PDF

  2. Resonance Frequency

    • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 1-56

  3. Quality Factor

    • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 57-90

  4. Responsivity

    • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 91-114

  5. Transduction

    • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 115-147

  6. Measurement and Noise

    • Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 149-172

  7. Back Matter

    Pages 173-175
    PDF
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About this book

This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.
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Keywords

  • Resonance frequency
  • Eigenmodes
  • Continuum mechanical structures
  • Vibrations
  • Liquid damping
  • Gas damping
  • Clamping loss
  • Intrinsic damping
  • Frequency response
  • Transduction
  • Amplitude noise
  • Frequency noise
  • Nanomechanical sensing
  • Resonator crystal
  • Thermoelastic actuation
  • String resonators
  • Top-down fabrication
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Authors and Affiliations

  • Vienna University of Technology, Wien, Austria

    Silvan Schmid

  • École Polytechnique Fédérale de, Lausanne, Switzerland

    Luis Guillermo Villanueva

  • California Institute of Technology, Pasadena, USA

    Michael Lee Roukes

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About the authors

Silvan Schmid is Associate Professor of Micro and Nanotechnology at the Technical University of Denmark. His research focus is in micro- and nanomechanical resonators for sensor applications and fundamental research.

Guillermo Villanueva is Professor at Ecole Polytechnique Federale de Lausanne (EPFL). His fields of expertise are MEMS/NEMS, sensors, oscillators, nonlinear and coupled dynamics, and fundamental noise processes.

Michael Lee Roukes is Robert M. Abbey Professor of Physics, Applied Physics, and Biological Engineering at California Institute of Technology. He was founding Director of Caltech’s Kavli Nanoscience Institute from 2003-2006, and Co-Director from 2008-2013.
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Bibliographic Information

  • Book Title: Fundamentals of Nanomechanical Resonators

  • Authors: Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes

  • DOI: https://doi.org/10.1007/978-3-319-28691-4

  • Publisher: Springer Cham

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: Springer International Publishing Switzerland 2016

  • Hardcover ISBN: 978-3-319-28689-1Published: 29 June 2016

  • Softcover ISBN: 978-3-319-80406-4Published: 30 May 2018

  • eBook ISBN: 978-3-319-28691-4Published: 21 June 2016

  • Edition Number: 1

  • Number of Pages: VIII, 175

  • Number of Illustrations: 24 b/w illustrations, 66 illustrations in colour

  • Topics: Engineering Design, Control, Robotics, Automation, Microsystems and MEMS

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Access via your institution
eBook USD 89.00
Price excludes VAT (USA)
  • ISBN: 978-3-319-28691-4
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Softcover Book USD 119.99
Price excludes VAT (USA)
Hardcover Book USD 119.99
Price excludes VAT (USA)
Learn about institutional subscriptions