Overview
- Includes supplementary material: sn.pub/extras
Part of the book series: SpringerBriefs in Materials (BRIEFSMATERIALS)
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Table of contents (5 chapters)
Keywords
About this book
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The book will describe the ballistic and continuum descriptions of gas transport on nanostructured materials and then will move on to incorporate the impact of precursor-surface interaction. We will finally conclude approaching the subjects of feature shape evolution and the connection between nano and reactor scales and will briefly present different advanced algorithms that can beused to effectively compute particle transport, in some cases borrowing from other disciplines such as radiative heat transfer. The book gathers in a single place information scattered over thirty years of scientific research, including the most recent results in the field of Atomic Layer Deposition. Besides a mathematical description of the fundamentals of thin film growth in nanostructured materials, it includes analytic expressions and plots that can be used to predict the growth using gas phase synthesis methods in a number of ideal approximations. The focus on the fundamental aspects over particular processes will broaden the appeal and the shelf lifetime of this book. The reader of this book will gain a thorough understanding on the coating of high surface area and nanostructured materials using gas phase thin film deposition methods, including the limitations of each technique. Those coming from the theoretical side will gain the knowledge required to model the growth process, while those readers more interested in the process development will gain the theoretical understanding will be useful for process optimization.
Authors and Affiliations
Bibliographic Information
Book Title: Growth and Transport in Nanostructured Materials
Book Subtitle: Reactive Transport in PVD, CVD, and ALD
Authors: Angel Yanguas-Gil
Series Title: SpringerBriefs in Materials
DOI: https://doi.org/10.1007/978-3-319-24672-7
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: The Author(s) 2017
Softcover ISBN: 978-3-319-24670-3Published: 16 December 2016
eBook ISBN: 978-3-319-24672-7Published: 30 November 2016
Series ISSN: 2192-1091
Series E-ISSN: 2192-1105
Edition Number: 1
Number of Pages: XI, 128
Number of Illustrations: 37 b/w illustrations, 20 illustrations in colour
Topics: Surfaces and Interfaces, Thin Films, Surface and Interface Science, Thin Films, Nanochemistry, Semiconductors, Energy Storage