Microsystems Mechanical Design

  • Francesco De Bona
  • Eniko T. Enikov

Part of the CISM International Centre for Mechanical Sciences book series (CISM, volume 478)

Table of contents

  1. Front Matter
    Pages i-vii
  2. Eugenio G. M. Brusa
    Pages 57-80
  3. Francesco De Bona, Mircea Gh. Munteanu
    Pages 81-100
  4. Francesco De Bona, Saša Zelenika
    Pages 119-134
  5. Lap Man Lee, Luthur Siu Lun Cheung, Yitshak Zohar
    Pages 157-211

About this book

Introduction

Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.

Keywords

Nanotechnologie behavior design dynamics engineering mechanics fluidics mechanics mechanism mechanisms microelectromechanical system (MEMS) microfluidics microstructure microsystems modeling nano-scale

Editors and affiliations

  • Francesco De Bona
    • 1
  • Eniko T. Enikov
    • 2
  1. 1.University of UdineItaly
  2. 2.University of ArizonaUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-211-48549-1
  • Copyright Information CISM, Udine 2006
  • Publisher Name Springer, Vienna
  • eBook Packages Engineering
  • Print ISBN 978-3-211-37453-5
  • Online ISBN 978-3-211-48549-1
  • About this book