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  • © 2020

Process Variations in Microsystems Manufacturing

Authors:

  • Examines and explains the basic processing steps used in MEMS fabrication

  • Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies

  • Reviews future methods that may provide for improved process variations

Part of the book series: Microsystems and Nanosystems (MICRONANO)

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eBook USD 169.00
Price excludes VAT (USA)
  • ISBN: 978-3-030-40560-1
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Hardcover Book USD 219.99
Price excludes VAT (USA)

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Table of contents (10 chapters)

  1. Front Matter

    Pages i-xix
  2. Introduction

    • Michael Huff
    Pages 1-8
  3. An Overview of MEMS Microsystems

    • Michael Huff
    Pages 9-44
  4. Metrology for Microsystems Manufacturing

    • Michael Huff
    Pages 173-225
  5. Microsystems Material Properties

    • Michael Huff
    Pages 227-273
  6. Back Matter

    Pages 509-521

About this book

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

  • Examines and explains the basic processing steps used in MEMS fabrication; 
  • Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies;
  • Reviews future methods that may provide for improved process variations.

Keywords

  • MEMS
  • Micro-Electro-Mechanical Systems
  • Micro-machining
  • Microactuators
  • Microsensors
  • Microsystems
  • Microsystems Design
  • Microsystems Manufacturing
  • Microsystems Manufacturing

Authors and Affiliations

  • Corporation for National Research Initiatives, MEMS & Nanotechnology Exchange, Reston, USA

    Michael Huff

About the author

Michael A. Huff, Ph.D., is Founder and Director of the MEMS & Nanotechnology Exchange (MNX) in Reston, Virginia. The MNX was established as a national-level program to provide access to MEMS implementation resources as well as to develop manufacturing techniques to help advance the technology. Dr. Huff has actively participated in MEMS research and development for over twenty-five years, has published numerous papers on MEMS devices and fabrication technologies, and holds more than a dozen patents and has several others pending. He has held a variety of notable positions, from industry to academia. Prior to establishing the MNX, Dr. Huff was on the faculty in the Department of Electrical Engineering at Case Western Reserve University (CWRU) in Cleveland, Ohio. Before joining the faculty at CWRU, he held the position of Technical Fellow at the Baxter Healthcare Corporation and directed Baxter's corporate-wide efforts in applying MEMS technology to novel medical devices. Dr. Huff received an M.S. in Electrical Engineering and Computer Science and simultaneously the M.S. in Material Science and Engineering with a specialization in Electronic Materials and a Ph.D. in Electrical Engineering and Computer Science from the Massachusetts Institute of Technology. 

Bibliographic Information

Buying options

eBook USD 169.00
Price excludes VAT (USA)
  • ISBN: 978-3-030-40560-1
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Hardcover Book USD 219.99
Price excludes VAT (USA)